Change search
ReferencesLink to record
Permanent link

Direct link
Growth and characterization of TiN/SiN(001)superlattice films
Luleå University of Technology, Department of Engineering Sciences and Mathematics, Material Science.
Thin Film Physics Division, Linköping University.
Thin Film Physics Division, Linköping University.
Show others and affiliations
2007 (English)In: Journal of Materials Research, ISSN 0884-2914, E-ISSN 2044-5326, Vol. 22, no 11, 3255-3264 p.Article in journal (Refereed) Published
Abstract [en]

We report the layer structure and composition in recently discovered TiN/SiN(001) superlattices deposited by dual-reactive magnetron sputtering on MgO(001) substrates. High-resolution transmission electron microscopy combined with Z-contrast scanning transmission electron microscopy, x-ray reflection, diffraction, and reciprocal-space mapping shows the formation of high-quality superlattices with coherently strained cubic TiN and SiN layers for SiN thickness below 7-10 Å. For increasing SiN layer thicknesses, a transformation from epitaxial to amorphous SiNx (x 1) occurs during growth. Elastic recoil detection analysis revealed an increase in nitrogen and argon content in SiNx layers during the phase transformation. The oxygen, carbon, and hydrogen contents in the multilayers were around the detection limit (∼0.1 at.%) with no indication of segregation to the layer interfaces. Nanoindentation experiments confirmed superlattice hardening in the films. The highest hardness of 40.4 ± 0.8 GPa was obtained for 20-Å TiN with 5-Å-thick SiN(001) interlayers, compared to monolithic TiN at 20.2 ± 0.9 GPa.

Place, publisher, year, edition, pages
2007. Vol. 22, no 11, 3255-3264 p.
Research subject
Engineering Materials
URN: urn:nbn:se:ltu:diva-11179Local ID: a15c2470-9dc9-11dc-9810-000ea68e967bOAI: diva2:984128
Validerad; 2007; 20071128 (cira)Available from: 2016-09-29 Created: 2016-09-29Bibliographically approved

Open Access in DiVA

fulltext(836 kB)2 downloads
File information
File name FULLTEXT01.pdfFile size 836 kBChecksum SHA-512
Type fulltextMimetype application/pdf

Search in DiVA

By author/editor
Söderberg, HansOdén, Magnus
By organisation
Material Science
In the same journal
Journal of Materials Research

Search outside of DiVA

GoogleGoogle Scholar
Total: 2 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 2 hits
ReferencesLink to record
Permanent link

Direct link