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Optogalvanic spectroscopy with microplasma sources – Current status and development towards lab on a chip
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC). (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC). Swedish Def Univ, Div Mil Technol, Dept Mil Sci, Stockholm, Sweden. (ÅSTC)
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2016 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, no 10, 104003Article in journal (Refereed) Published
Abstract [en]

Miniaturized optogalvanic spectroscopy (OGS) shows excellent prospects of becoming ahighly sensitive method for gas analysis in micro total analysis systems. Here, a status reporton the current development of microwave induced microplasma sources for OGS is presented,together with the first comparison of the sensitivity of the method to conventional single-passabsorption spectroscopy. The studied microplasma sources are stripline split-ring resonators(SSRRs), with typical ring radii between 3.5 and 6 mm and operation frequencies around2.6 GHz. A linear response (R2 = 0.9999), and a stability of more than 100 s are demonstratedwhen using the microplasma source as an optogalvanic detector. Additionally, saturationeffects at laser powers higher than 100 mW are observed, and the temporal response of theplasma to periodic laser perturbation with repletion rates between 20 Hz and 200 Hz arestudied. Finally, the potential of integrating additional functionality with the detector isdiscussed, with the particular focus on a pressure sensor and a miniaturized combustor toallow for studies of solid samples.

Place, publisher, year, edition, pages
2016. Vol. 26, no 10, 104003
Keyword [en]
Optogalvanic spectroscopy, split-ring resonator, microplasma sources
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Atom and Molecular Physics and Optics
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-284627DOI: 10.1088/0960-1317/26/10/104003ISI: 000384028900003OAI: oai:DiVA.org:uu-284627DiVA: diva2:920733
Funder
Swedish National Space Board, 104/14
Note

Awaiting publication online. 

Available from: 2016-04-19 Created: 2016-04-19 Last updated: 2016-10-27Bibliographically approved

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Persson, AndersBerglund, MartinKhaji, ZahraSturesson, PeterThornell, Greger
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Other Electrical Engineering, Electronic Engineering, Information EngineeringAtom and Molecular Physics and Optics

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