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Micromachined Waveguide Integrated RF MEMS Phase Sifter Operating between 500-600 GHz
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)ORCID iD: 0000-0002-8264-3231
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2015 (English)Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents a 500-600 GHz submillimeter- wave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is loaded by 9 E-plane stubs, which can be individually blocked by using MEMS–reconfigurable surfaces. The phase-shifter is composed of three metallized silicon chips which are assembled in H-plane cuts of the waveguide.

Place, publisher, year, edition, pages
2015.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-185179OAI: oai:DiVA.org:kth-185179DiVA: diva2:919029
Conference
16th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS. 29 june -1 July
Note

QC 20160418

Available from: 2016-04-12 Created: 2016-04-12 Last updated: 2016-04-18Bibliographically approved

Open Access in DiVA

fulltext(604 kB)72 downloads
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16th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS

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Shah, UmerOberhammer, Joachim
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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf