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Combinatorial magnetron sputtering of AgFeO2 thin films with the delafossite structure
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
ABB AB, Corp Res, Insulat & Mat Technol, SE-72178 Vasteras, Sweden..
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2016 (English)In: Materials & Design, ISSN 0261-3069, Vol. 91, 132-142 p.Article in journal (Refereed) PublishedText
Abstract [en]

The main objective of this study is to demonstrate the strength of the combinatorial approach to rapidly and effectively identify suitable process parameters for the synthesis of AgFeO2 filmswith layered delafossite structure. (00l)- textured delafossite AgFeO2 thin films have been successfully deposited for the first time without post-annealing by magnetron sputtering from elemental silver and iron targets in a reactive Ar-O-2 atmosphere. Gradient filmswith a wide composition range were deposited on singlewafers and subsequent screenings of phase- and chemical compositions were employed to optimize process parameters. The optimum deposition temperature for single-phase AgFeO2 growth was 450 degrees C using a Ag target powered at 15 W with a pulsing frequency of 150 kHz and a Fe target powered at constant 120 W at a total pressure of 4 mTorr and a O-2 partial pressure of 0.8 mTorr. Selected films were studied with scanning electron microcopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The optical band gap for the indirect transition in the AgFeO2 film was determined to 1.7 +/- 0.1 eV, and the band gap for the direct transition was 2.5 +/- 0.1 eV. The film showed insulating electrical properties.

Place, publisher, year, edition, pages
2016. Vol. 91, 132-142 p.
Keyword [en]
Combinatorial sputtering, Delafossite, Thin film, AgFeO2
National Category
Materials Engineering
URN: urn:nbn:se:uu:diva-274897DOI: 10.1016/j.matdes.2015.11.092ISI: 000367235400016OAI: diva2:899873
SweGRIDS - Swedish Centre for Smart Grids and Energy StorageKnut and Alice Wallenberg FoundationSwedish Research Council
Available from: 2016-02-02 Created: 2016-01-26 Last updated: 2016-08-30Bibliographically approved

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Mao, FangNyberg, TomasThersleff, ThomasJansson, Ulf
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