Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Performance of LTCC embedded gas sensors
Microelectronics and Material Physics Laboratories University of Oulu, Finland.
Microelectronics and Material Physics Laboratories University of Oulu, Finland.
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, Faculty of Science & Engineering. Microelectronics and Material Physics Laboratories University of Oulu, Finland.
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, Faculty of Science & Engineering. Microelectronics and Material Physics Laboratories University of Oulu, Finland.ORCID iD: 0000-0002-2817-3574
Show others and affiliations
2015 (English)In: Procedia Engineering, ISSN 1877-7058, E-ISSN 1877-7058, Vol. 120, 253-256 p.Article in journal (Refereed) Published
Abstract [en]

A novel approach to encapsulation/packaging of SiC field effect transistor gas sensors for high temperature applications, such as exhaust and fuel gas emissions monitoring, based on direct co-firing of sensor devices and Low-Temperature Co-fired Ceramics (LTCC) has been investigated. Structural (SEM, EDX, XPS), electrical (I/V, C/V) as well as gas sensing characterization of packaged devices has shown that the “one-step” packaging process forms a hermetic package with retained transducer functionality and gas sensing characteristics without the need for any separate die attachment, (wire) bonding, and/or sealing of the package. Long-term stability testing at elevated temperatures of packaged devices has also shown promising results.

Place, publisher, year, edition, pages
2015. Vol. 120, 253-256 p.
Keyword [en]
LTCC;SiC;packaging;gas sensors
National Category
Other Chemical Engineering Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-124049DOI: 10.1016/j.proeng.2015.08.599OAI: oai:DiVA.org:liu-124049DiVA: diva2:895393
Available from: 2016-01-18 Created: 2016-01-18 Last updated: 2017-11-30Bibliographically approved

Open Access in DiVA

fulltext(641 kB)106 downloads
File information
File name FULLTEXT01.pdfFile size 641 kBChecksum SHA-512
bbba4ae67201dc5102e73c0514493e68a67daf33dc0f070131973b4d3c27e2cb7abf9ae2b7191b2318d034908dafa2358cfa8245e0bd4e347a44e7223ed0cbbc
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Search in DiVA

By author/editor
Khajavizadeh, LidaAndersson, MikeLloyd Spetz, Anita
By organisation
Applied Sensor ScienceFaculty of Science & Engineering
In the same journal
Procedia Engineering
Other Chemical EngineeringPhysical Sciences

Search outside of DiVA

GoogleGoogle Scholar
Total: 106 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 228 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf