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Electronic properties of intrinsic defects and impurities in GaN
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.
2015 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

With its outstanding properties such as a wide direct bandgap (3.4 eV), high electron mobility and high breakdown voltage, GaN and its alloys with In and Al are considered as one of the most important semiconductors for optoelectronic devices and high-power and high-frequency transistors. The most important application of GaN today is high-brightness blue LEDs, which is used for white LEDs. With the discovery of GaN-based blue LED, Isamu Akasaki, Hiroshi Amano and Shuji Nakamura were awarded the Nobel Prize in 2014. Intrinsic defects and impurities are important in semiconductors since they influence the electronic properties. An impurity is one or several foreign atoms in the host crystal while an intrinsic defect is an imperfection in the host’s crystal lattice. Normally, impurities and intrinsic defects can be introduced either intentionally or unintentionally into semiconductors during the growth process, during processing of the device or from the working environment. Especially for GaN, due to the lack of native substrates, most of the GaN-based device structures are fabricated on foreign substrates such as silicon carbide (SiC) or sapphire (Al2O3). Growth on foreign substrates gives rise to high threading dislocation densities, and they can give rise to electronically active intrinsic defects that influence the performance of the device.

This thesis is focused on electrical characterization of intrinsic defects and impurities in GaN grown by halide vapor phase epitaxy (HVPE) and metalorganic vapor phase epitaxy (MOCVD). In the first part of the thesis, impurities and intrinsic defects in freestanding thick HVPE grown GaN and Mg-doped MOCVD grown GaN is studied. In thick HVPE grown GaN, six electron traps were detected, where two of them were introduced by the polishing process. For three of the traps, the temperature dependence of the electron capture cross section was studied. From their electron capture properties, it was suggested that the traps are  associated with point defects. In Mg-doped MOCVD grown GaN, one hole trap of high concentration was observed. The hole emission rate is enhanced by increasing electric field and by study the emission process in detail by simulation, it is suggested that the emission process is governed by both the Poole-Frenkel effect and phonon-assisted tunneling.

In the second part, intrinsic defects in GaN introduced intentionally by electron irradiation with different fluences have been studied. In electron irradiated HVPE grown GaN, three electron-irradiation-induced electron traps appeared after 2 MeV electron irradiation at a fluence of 1 × 1014 cm2. Due to the annealing behavior, two of the levels were suggested to be related to primary intrinsic defects. In addition, the temperature dependence of the electron capture cross sections for three levels in electron-irradiated GaN was studied. The temperature dependence of one of them showed that the electron capturing is governed by a cascade capturing process, whereas no temperature dependence was observed for the other levels. The thermal stability of electron traps introduced by 2 MeV electron irradiation was studied. Isochronal annealing shows that most of the defects, which has been associated to nitrogen vacancies, annealed out already at 550 K and by using isothermal annealing the activation energy of one of the process was determined. By minority carrier spectroscopy and deep level transient spectroscopy, hole and electron traps in as-grown and 2 MeV ntype electron irradiated GaN were studied. One hole trap was observed in the as-grown material. By electron irradiation, it was observed that the concentration increases. Simultaneously, the concentration of two electron traps increases. Due to the low introduction rate of one of the electron traps, it is suggested that the defect is associated with a primary defect decorating extended structural defects. The high introduction rate of the hole trap suggests that the defect is associated with a primary intrinsic defect or a complex.

Place, publisher, year, edition, pages
Linköping: Linköping University Electronic Press, 2015. , 55 p.
Series
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 1701
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-121710DOI: 10.3384/diss.diva-121710ISBN: 978-91-7685-950-6 (print)OAI: oai:DiVA.org:liu-121710DiVA: diva2:858389
Public defence
2015-10-26, Planck, Fysikhuset, Campus Valla, Linköping, 10:15 (English)
Opponent
Supervisors
Available from: 2015-10-02 Created: 2015-10-02 Last updated: 2015-10-07Bibliographically approved
List of papers
1. Investigation of deep levels in bulk GaN material grown by halide vapor phase epitaxy
Open this publication in new window or tab >>Investigation of deep levels in bulk GaN material grown by halide vapor phase epitaxy
2013 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 114, no 15Article in journal (Refereed) Published
Abstract [en]

Electron traps in thick free standing GaN grown by halide vapor phase epitaxy were characterized by deep level transient spectroscopy. The measurements revealed six electron traps with activation energy of 0.252 (E1), 0.53 (E2), 0.65 (E4), 0.69 (E3), 1.40 (E5), and 1.55 eV (E6), respectively. Among the observed levels, trap E6 has not been previously reported. The filling pulse method was employed to determine the temperature dependence of the capture cross section and to distinguish between point defects and extended defects. From these measurements, we have determined the capture cross section for level E1, E2, and E4 to 3.2 × 10−16 cm2, 2.2 × 10−17 cm2, and 1.9 × 10−17 cm2, respectively. All of the measured capture cross sections were temperature independent in the measured temperature range. From the electron capturing kinetic, we conclude that trap E1, E2, and E3 are associated with point defects. From the defect concentration profile obtained by double correlated deep level transient spectroscopy, we suggest that trap E4 and E6 are introduced by the polishing process.

National Category
Engineering and Technology
Identifiers
urn:nbn:se:liu:diva-102085 (URN)10.1063/1.4825052 (DOI)000326117900032 ()
Note

Funding Agencies|Swedish Research Science Council (VR)||Swedish Energy Agency||

Available from: 2013-12-02 Created: 2013-11-29 Last updated: 2017-12-06
2. Deep level study of Mg-doped GaN using deep level transient spectroscopy and minority carrier transient spectroscopy
Open this publication in new window or tab >>Deep level study of Mg-doped GaN using deep level transient spectroscopy and minority carrier transient spectroscopy
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2016 (English)In: Physical Review B, ISSN 2469-9950, Vol. 94, no 4, 045206Article in journal (Refereed) Published
Abstract [en]

Deep levels in Mg doped GaN have been studied using deep level transient spectroscopyand minority charge carrier transient spectroscopy. Two traps are revealed in the investigatedtemperature range. In the substrate, one electron trap labelled ET1 (EC – 0.158 eV) is observedand in the Mg-doped layer, one hole trap labelled HT1 has been revealed. By varying theelectric field, it is found that the hole trap HT1 exhibits an electric field enhanced hole emissionrate. Using four theoretical models based on 3-dimensional Coulombic Poole-Frenkel effect, 3-dimensional square well Poole-Frenkel effect, phonon assisted tunneling, and 1-dimensionalCoulombic Poole-Frenkel effect including phonon assisted tunneling, the experimental data arefitted in order to justify the field enhanced emission process. It is found that the 1-dimensionalCoulombic Poole-Frenkel model including phonon assisted tunneling is consistent with theexperimental data. Since the trap exhibits Poole-Frenkel effect, we suggest it is acceptor like.From the theoretical model, the zero field activation energy of HT1 and an estimate of the holecapture cross section have been determined as Ev+0.57 eV and 1.9x10-15 cm2, respectively.Since the level is only observed in Mg-doped material, it is suggested that the trap can beassociated with a Mg related defect.

Place, publisher, year, edition, pages
AMER PHYSICAL SOC, 2016
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-121705 (URN)10.1103/PhysRevB.94.045206 (DOI)000381484500007 ()
Note

Funding agenices: Swedish Research Council [621-2010-3850]; Swedish Energy Agency [38338-1]

Vid tiden för disputation förelåg publikationen endast som manuskript

Available from: 2015-10-02 Created: 2015-10-02 Last updated: 2016-09-26Bibliographically approved
3. Radiation-induced defects in GaN bulk grown by halide vapor phase epitaxy
Open this publication in new window or tab >>Radiation-induced defects in GaN bulk grown by halide vapor phase epitaxy
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2014 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 105, no 10, 102103- p.Article in journal (Refereed) Published
Abstract [en]

Defects induced by electron irradiation in thick free-standing GaN layers grown by halide vapor phase epitaxy were studied by deep level transient spectroscopy. In as-grown materials, six electron traps, labeled D2 (E-C-0.24 eV), D3 (E-C-0.60 eV), D4 (E-C-0.69 eV), D5 (E-C-0.96 eV), D7 (E-C-1.19 eV), and D8, were observed. After 2MeV electron irradiation at a fluence of 1 x 10(14) cm(-2), three deep electron traps, labeled D1 (E-C-0.12 eV), D5I (E-C-0.89 eV), and D6 (E-C-1.14 eV), were detected. The trap D1 has previously been reported and considered as being related to the nitrogen vacancy. From the annealing behavior and a high introduction rate, the D5I and D6 centers are suggested to be related to primary intrinsic defects.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2014
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-111755 (URN)10.1063/1.4895390 (DOI)000342758700028 ()
Note

Funding Agencies|Swedish Research Council (VR); Swedish Energy Agency

Available from: 2014-10-31 Created: 2014-10-31 Last updated: 2017-12-05Bibliographically approved
4. Electronic properties of defects in high-fluence electron irradiated bulk GaN
Open this publication in new window or tab >>Electronic properties of defects in high-fluence electron irradiated bulk GaN
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2016 (English)In: Physica status solidi. B, Basic research, ISSN 0370-1972, E-ISSN 1521-3951, Vol. 253, no 3, 521-526 p.Article in journal (Refereed) Published
Abstract [en]

Using deep level transient spectroscopy, deep levels and capture cross sections of defects introduced by high-fluence electron irradiation of thick halide vapour phase epitaxy grown GaN has been studied. After irradiation with 2 MeV electrons to a high-fluence of 5×1016 cm-2, four deep trap levels, labelled T1 (EC – 0.13 eV), T2 (EC – 0.18 eV), T3 (EC – 0.26 eV) T4 and a broad band of peaks consisting of at least two levels could be observed. These defects, except T1 and T3, were annealed out after annealing at 650 K for 2 hours. The capture cross section is found to be temperature independent for T2 and T3, while T1 shows an decresing capture cross section with increasing temperature, suggesting that electron capturing to this deep level is governed by a cascade capturing process.

Place, publisher, year, edition, pages
John Wiley & Sons, 2016
Keyword
Deep level, GaN, DLTS, irradiation
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-121707 (URN)10.1002/pssb.201552521 (DOI)000371634800018 ()
Note

Funding agencies: Swedish Research Council (VR); Swedish Energy Agency

Available from: 2015-10-02 Created: 2015-10-02 Last updated: 2017-12-01Bibliographically approved
5. Thermal behavior of irradiation-induced-deep levels in bulk GaN
Open this publication in new window or tab >>Thermal behavior of irradiation-induced-deep levels in bulk GaN
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2015 (English)Manuscript (preprint) (Other academic)
Abstract [en]

Bulk GaN grown by halide vapor phase epitaxy and irradiated by 2 MeV electrons at a fluence of 5×1016 cm-2 were studied by deep level transient spectroscopy. After irradiation, two new peaks labelled D0 (EC – 0.18 eV) and D1 (EC – 0.13 eV) are observed. From isochronal annealing studies in the temperature range of 350 - 600 K, it is observed that peak D0 is completely annealed out already at 550 K while the broad peak D1 has a more complex annealing behavior. The concentration of D1 is decreasing during annealing and its peak position is shifted to higher temperatures, until a relatively stable peak labelled D2 (EC – 0.24 eV) is formed. From an isothermal annealing study of D2, it is concluded that the annealing process can be described by a first order annealing process with an activation energy and prefactor of 1.2 eV and 6.6 × 105 s-1, respectively. From the large pre-factor it is concluded that the annihilation of D2 is governed by a long-range migration process. From its annealing behavior, it is suggested that trap D2 may be related to the VGa.

Keyword
Deep level, GaN, DLTS, irradiation
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-121708 (URN)
Available from: 2015-10-02 Created: 2015-10-02 Last updated: 2015-10-02Bibliographically approved
6. Deep levels in as-grown and electron-irradiated n-type GaN studied by deep level transient spectroscopy and minority carrier transient spectroscopy
Open this publication in new window or tab >>Deep levels in as-grown and electron-irradiated n-type GaN studied by deep level transient spectroscopy and minority carrier transient spectroscopy
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2016 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 119, no 9Article in journal (Refereed) Published
Abstract [en]

By minority carrier transient spectroscopy on as-grown n-type bulk GaN produced by halide vapor phase epitaxy (HVPE) one hole trap labelled H1 (EV + 0.34 eV) has been detected. After 2 MeV-energy electron irradiation, the concentration of H1 increases and at fluences higher than 5×1014 cm-2, a second hole trap labelled H2 is observed. Simultaneously, the concentration of two electron traps, labelled T1 (EC - 0.12 eV) and T2 (EC - 0.23 eV) increases. By studying the increase of the concentration versus electron irradiation fluences, the introduction rate of T1 and T2 using 2 MeV-energy electrons was determined to 7X10-3 cm-1 and 0.9 cm-1, respectively. Due to the low introduction rate of T1 and the low threading dislocation density in the HVPE bulk GaN material, it is suggested that the defect is associated with a primary defect decorating extended structural defects. The high introduction rate of the trap H1 suggests that the H1 defect is associated with a primary intrinsic defect or a complex.

Keyword
Deep level, GaN, DLTS, irradiation
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-121709 (URN)10.1063/1.4943029 (DOI)000372351900075 ()
Note

Funding agencies:  Swedish Research Council (VR); Swedish Energy Agency

Vid tiden för disputation förelåg publikationen som manuskript

Available from: 2015-10-02 Created: 2015-10-02 Last updated: 2017-12-01Bibliographically approved

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