Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ
2015 (English)In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, IEEE conference proceedings, 2015, 811-814 p.Conference paper (Refereed)
This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2015. 811-814 p.
MEMS foundry, NiFe/AlN multilayer composite, RF microstrip, magnetic materials, micromachined inductors
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-172290DOI: 10.1109/TRANSDUCERS.2015.7181047ISI: 000380461400202ScopusID: 2-s2.0-84955485398OAI: oai:DiVA.org:kth-172290DiVA: diva2:846217
18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),Anchorage, AK, USA ,21-25 June 2015
QC 201508282015-08-142015-08-142016-09-02Bibliographically approved