Change search
ReferencesLink to record
Permanent link

Direct link
Influence of deposition parameters on the microstructure of ion-plated films
University of Buenos Aires, Argentina .ORCID iD: 0000-0003-3277-1945
University of Buenos Aires, Argentina .
1996 (English)In: AIP Conference Proceedings, ISSN 0094-243X, E-ISSN 1551-7616, Vol. 378, 356-359 p.Article in journal (Refereed) Published
Abstract [en]

Ion plating is essentially vapor deposition onto a substrate which is the cathode of a glow discharge. The most important characteristic of the technique is that the growing film is subjected to a flux of high energy particles (neutrals and ions). In this study we report information about the effect of ion plating parameters on grain diameter and crystallite size distribution. At a constant potential grain size remains constant with the increase of ion density. On the other hand, at a constant ion density the grain size decreases with the substrate potential increment. Ion bombardment also has an effect on the crystallite size distribution. The ion plated films show a higher degree of uniformity in grain size than vacuum evaporated films. In contrast with vacuum evaporated films, where the grain size is proportional to the thickness, no variation of grain size with film thickness has been observed for the ion‐plated films. Electron diffraction patterns have shown that the orientation remains near random over the entire J and V range studied.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 1996. Vol. 378, 356-359 p.
Keyword [en]
ion-plating; thin films; grain size; plasma; ion energy
National Category
Physical Sciences
URN: urn:nbn:se:liu:diva-112704DOI: 10.1063/1.51122OAI: diva2:769678
8th Latin American congress on surface science: Surfaces , vacuum, and their applications, 19−23 September 1994, Cancun, Mexico
Available from: 2014-12-08 Created: 2014-12-08 Last updated: 2014-12-16Bibliographically approved

Open Access in DiVA

fulltext(783 kB)91 downloads
File information
File name FULLTEXT01.pdfFile size 783 kBChecksum SHA-512
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Search in DiVA

By author/editor
Broitman, Esteban
In the same journal
AIP Conference Proceedings
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar
Total: 91 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 60 hits
ReferencesLink to record
Permanent link

Direct link