Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Oxygen content and depth profiling in silicon surface technology studied by the 16O(α, α)16O resonance at 3.045 MeV
Uppsala Universitet.
Uppsala Universitet.
Uppsala Universitet.
Uppsala Universitet.
Show others and affiliations
1978 (English)In: Physica Scripta, ISSN 0031-8949, E-ISSN 1402-4896, Vol. 18, 353-356 p.Article in journal (Refereed) Published
Abstract [en]

The use of the t6O(o,o)160 elastic scattering resonance reaction forthe study of low concentration of oxygen such as found in interfacesin silicon technology is described. We have investigated the depth resolution and the limit of the sensitivity that can be obtained with thismethod. The method has been applied to the study of AlrQ{r "sandwich" film structures and to Au and amorphous Ge contacts to silicon.

Place, publisher, year, edition, pages
1978. Vol. 18, 353-356 p.
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:miun:diva-23476OAI: oai:DiVA.org:miun-23476DiVA: diva2:765060
Available from: 2014-11-21 Created: 2014-11-21 Last updated: 2017-12-05Bibliographically approved

Open Access in DiVA

fulltext(342 kB)53 downloads
File information
File name FULLTEXT01.pdfFile size 342 kBChecksum SHA-512
48c8ce0c8dd198ab80974ba45d1c637840d0c725f5e14315ccdfbcc95626b57e7b221c22936e1130c2930333a717e4356788c4e80be336e98d4a1363f3829091
Type fulltextMimetype application/pdf

Authority records BETA

Petersson, Sture

Search in DiVA

By author/editor
Petersson, Sture
In the same journal
Physica Scripta
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar
Total: 53 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 63 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf