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Reactive sputtering of NbCx-based nanocomposite coatings: An up-scaling study
Uppsala University, Sweden .
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. Impact Coatings AB, Linköping, Sweden.
ABB AB Corporate Research, Västerås, Sweden.
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2014 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 253, 100-108 p.Article in journal (Refereed) Published
Abstract [en]

Nanocomposite Nb-C coatings, with a C/Nb ratio of 0.93-1.59, have been deposited by reactive sputtering in a commercial sputtering system where the C is supplied from an acetylene gas at deposition rates of up to 200 nm/min. The coatings are compared to non-reactively sputtered Nb-C coatings deposited from Nb and C targets in lab-scale equipment at deposition rates two orders of magnitude lower. X-ray diffraction, X-ray photoelectron spectroscopy, and electron microscopy are used to conclude that all coatings consist of nanoctystalline Nbc(x) grains (nc-NbCx) embedded in a matrix of amorphous C (a-C). The coating performance was evaluated in terms of their mechanical, tribological, and electrical properties. The chemical stability of the coatings was evaluated by exposure to a flowing mixture of corrosive gases. It is found that the coatings have comparable microstructure and performance to the coatings deposited by non-reactive sputtering. The high deposition rate and presence of different C-radicals on the coating surface during film growth for the reactively sputtered coatings are believed to result in a smaller NbCx grain size compared to the non-reactively sputtered coatings (reactive process: 10-3 nm, non-reactive process: similar to 75-3 nm). This difference results in a thinner a-C matrix of about 0.2 nm, which is not varying with C content for the reactively sputtered coatings. The thinner a-C matrix is reflected in coating properties, with a higher conductivity and slightly higher hardness. The coating richest in C content (C/Nb ratio 1.59) shows the lowest friction (0.23), wear rate (0.17 x 10(-6) mm(3)/mN), and contact resistance before (11 m Omega at 10 N) and after (30 m Omega at 10 N) the chemical stability test. These results imply that nc-NbCx/a-C coatings of this composition are a good candidate for electrical contact applications, and that up-scaling of the process is achievable.

Place, publisher, year, edition, pages
Elsevier, 2014. Vol. 253, 100-108 p.
Keyword [en]
Thin film; Carbide; Electrical contacts; Contact resistance; Friction
National Category
Physical Sciences
URN: urn:nbn:se:liu:diva-109358DOI: 10.1016/j.surfcoat.2014.05.021ISI: 000339150200014OAI: diva2:738079
Available from: 2014-08-15 Created: 2014-08-15 Last updated: 2016-08-31Bibliographically approved

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Tengstrand, OlofFlink, AxelEklund, PerHultman, Lars
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