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Monocrystalline‐Silicon Microwave MEMS
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
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2013 (English)In: Proceedings of PIERS 2013 in Stockholm, August 12-15, 2013, Cambridge, MA: The Electromagnetics Academy , 2013, 1933-1941 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper gives an overview of recent achievements in microwave micro‐electromechanical systems (microwave MEMS) at KTH Royal Institute of Technology, Stockholm, Sweden. The first topic is a micromachined W‐band phase shifter based on a micromachined dielectric block which is vertically moved by integrated MEMS actuators to achieve a tuning of the propagation constant of a micromachined transmission line. The second topic is W‐band MEMStuneable microwave high‐impedance metamaterial surfaces conceptualized for local tuning of the electromagnetic resonance properties of surface waves on a high‐impedance surface. The third topic covers 3‐dimensional micromachined coplanar transmission lines with integrated MEMS actuators which move the sidewalls of these transmission lines. Multi‐stable switches, tuneable capacitors, tuneable couplers, and tuneable filters have been implemented and characterized for 1‐40 GHz frequencies. As a forth topic, micromachined waveguide switches are presented. Finally, silicon‐micromachined near‐field and far‐field sensor and antenna interfaces are shown, including a micromachined planar lens antenna and a tapered dielectric rod measurement probe for medical applications.

Place, publisher, year, edition, pages
Cambridge, MA: The Electromagnetics Academy , 2013. 1933-1941 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-131763ISBN: 978-1-934142-26-4 (print)OAI: diva2:657049
PIERS Progress In Electromagnetics Research Symposium, Stockholm, Sweden, 12-15 August 2013

QC 20131217

Available from: 2013-10-17 Created: 2013-10-17 Last updated: 2013-12-17Bibliographically approved

Open Access in DiVA

fulltext(1285 kB)