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Ag-In transient liquid phase bonding for high temperature stainless steel micro actuators
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2013 (English)Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

A stainless steel, high temperature, phase change micro actuator has been demonstrated using the solid-liquid phase transition of mannitol at 168°C and In-Ag transient liquid phase diffusion bonding. Joints created with this bonding technique can sustain temperatures up to 695°C, while being bonded at only 180°C, and have thicknesses between 1.4 to 6.0 μm. Physical vapour deposition, inkjet printing and electroplating have been evaluated as deposition methods for bond layers. For actuation, cavities were filled with mannitol and when heated, the expansion was used to deflect a 10 μm thick stainless steel membrane. Bond strengths of the joints are found to be in the region of 0.51 to 2.53 MPa and pressurised cavities sustained pressures of up to 30 bar. Bond strength is limited by the bond contact area and the surface roughness of the bonding layers.

Place, publisher, year, edition, pages
2013. , 50 p.
UPTEC K, ISSN 1650-8297 ; 13020
Keyword [en]
TLP, PCM, microactuator, mannitol, high temperature, microsystems
National Category
Materials Engineering
URN: urn:nbn:se:uu:diva-207559OAI: diva2:648619
Educational program
Master Programme in Chemical Engineering
Available from: 2013-12-04 Created: 2013-09-16 Last updated: 2013-12-04Bibliographically approved

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