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Highly oriented δ-Bi2O3 thin films stable at room temperature synthesized by reactive magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
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2013 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 113, no 4Article in journal (Refereed) Published
Abstract [en]

We report the synthesis by reactive magnetron sputtering and structural characterization of highly (111)-oriented thin films of δ–Bi2O3. This phase is obtained at a substrate temperature of 150–200 °C in a narrow window of O2/Ar ratio in the sputtering gas (18%–20%). Transmission electron microscopy and x-ray diffraction reveal a polycrystalline columnar structure with (111) texture. The films are stable from room temperature up to 250 °C in vacuum and 350 °C in ambient air.

Place, publisher, year, edition, pages
American Institute of Physics (AIP) , 2013. Vol. 113, no 4
National Category
Engineering and Technology
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URN: urn:nbn:se:liu:diva-96495DOI: 10.1063/1.4789597ISI: 000314724500150OAI: oai:DiVA.org:liu-96495DiVA: diva2:642816
Available from: 2013-08-23 Created: 2013-08-20 Last updated: 2017-12-06

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Lunca Popa, PetruSønderby, SteffenLu, JunEklund, Per
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