Highly oriented δ-Bi2O3 thin films stable at room temperature synthesized by reactive magnetron sputtering
2013 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 113, no 4Article in journal (Refereed) Published
We report the synthesis by reactive magnetron sputtering and structural characterization of highly (111)-oriented thin films of δ–Bi2O3. This phase is obtained at a substrate temperature of 150–200 °C in a narrow window of O2/Ar ratio in the sputtering gas (18%–20%). Transmission electron microscopy and x-ray diffraction reveal a polycrystalline columnar structure with (111) texture. The films are stable from room temperature up to 250 °C in vacuum and 350 °C in ambient air.
Place, publisher, year, edition, pages
American Institute of Physics (AIP) , 2013. Vol. 113, no 4
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-96495DOI: 10.1063/1.4789597ISI: 000314724500150OAI: oai:DiVA.org:liu-96495DiVA: diva2:642816