Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes
2013 (English)In: Nano letters (Print), ISSN 1530-6984, E-ISSN 1530-6992, Vol. 13, no 7, 3237-3242 p.Article in journal (Refereed) Published
Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nanoelectromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nanoelectromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.
Place, publisher, year, edition, pages
2013. Vol. 13, no 7, 3237-3242 p.
Graphene, pressure sensor, piezoresistive effect, nanoelectromechanical systems (NEMS), MEMS
IdentifiersURN: urn:nbn:se:kth:diva-124556DOI: 10.1021/nl401352kISI: 000321884300038ScopusID: 2-s2.0-84880160546OAI: oai:DiVA.org:kth-124556DiVA: diva2:636621
FunderEU, European Research Council, 228229 277879 307311
QC 201307112013-07-102013-07-102016-06-10Bibliographically approved