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Characterization of High-Q Laterally Moving RF MEMS Tuneable Capacitor
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (RF MEMS)
2013 (English)In: European Microwave Week 2013, EuMW 2013 - Conference Proceedings; EuMC 2013: 43rd European Microwave Conference, 2013, 1323-1326 p.Conference paper (Refereed)
Abstract [en]

This paper investigates an implementation of RF MEMS tuneable capacitors based on the lateral displacement of the sidewalls of a three-dimensional micromachined coplanar transmission line. The concept achieves high Q since the mechanical actuation elements are completely de-coupled from the RF path, which is achieved by capacitive coupling of the ground signal to the moving sidewall. The fabricated capacitor has a tuning range of 40.53 to 60 fF (C-max/C-min = 1.48) in three discrete steps. This paper reports for the first time on Q-factor measurements, reliability, self-actuation robustness measurements, and linearity analysis. The Q-factor was determined by a transmission-line resonator as 88 at 40 GHz, resulting in a Qxf product of 3.52x10(12) which is higher than of any previously reported tuneable capacitor. Measurement data demonstrates high self-actuation robustness of 41.5 dBm at actuation and release voltages of 30.7 V and 21.15 V, a pull-in time of 60 mu s, and a mechanical resonance frequency of 5.3 kHz. The linearity of the device has been determined to an IIP3 of 71.4, 74.4 and 91.0 dBm for the three states of the capacitor. Reliability tests up to 1 billion cycles show no detectable performance degradation of this all-metal tuneable capacitor concept.

Place, publisher, year, edition, pages
2013. 1323-1326 p.
, European Microwave Conference, ISSN 2325-0305
Keyword [en]
Capacitive couplings, Coplanar transmission lines, Lateral displacements, Mechanical actuations, Mechanical resonance frequency, Performance degradation, Robustness measurements, Transmission line resonators
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
URN: urn:nbn:se:kth:diva-123163ISI: 000330768700335ScopusID: 2-s2.0-84893466246ISBN: 978-2-87487-031-6OAI: diva2:624958
2013 43rd European Microwave Conference, EuMC 2013 - Held as Part of the 16th European Microwave Week, EuMW 2013; Nuremberg; Germany; 7 October 2013 through 10 October 2013

QC 20130710

Available from: 2013-06-03 Created: 2013-06-03 Last updated: 2014-03-12Bibliographically approved

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Shah, UmerOberhammer, Joachim
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