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Basic Concept of Tuneable MEMS Directional Couplers for Ultra‐Wideband Applications
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201). (RF MEMS)
2012 (English)Conference paper, Oral presentation only (Refereed)
Abstract [en]

This paper reports on area-efficient, ultra-wideband, MEMS-reconfigurable directional couplers, whose coupling is tuned by mechanically changing the geometry of 3D-micromachined coupled transmission lines, utilizing integrated MEMS electrostatic actuators. Devices have been fabricated in an SOI RF MEMS process. Furthermore, to the best knowledge of the authors, we report for the first time on couplers which are reconfigured by changing the geometry of the groundplane coupling, either alone or including the conventional tuning of the direct coupling between the signal lines. This results in a very uniform and well predictable performance over a very large frequency band as proven in this paper. Two different concepts are presented and compared, along with measured RF performance and actuator characterization of fabricated devices.

Place, publisher, year, edition, pages
2012.
Keyword [en]
RF MEMS, tunable directional couplers, micromachining, 3D transmission line
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-117864OAI: oai:DiVA.org:kth-117864DiVA: diva2:603179
Conference
13th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012),02-04 July 2012, Antalya, Turkey
Note

QC 20130212

Available from: 2013-02-12 Created: 2013-02-05 Last updated: 2013-02-12Bibliographically approved

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fulltext(1351 kB)619 downloads
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Type fulltextMimetype application/pdf

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Shah, UmerSterner, MikaelOberhammer, Joachim
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CiteExportLink to record
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