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Deposition of Thin Film Electrolyte by Pulsed Laser Deposition (PLD) for micro-SOFC Development
Norwegian University of Science and Technology, Faculty of Natural Sciences and Technology, Department of Materials Science and Engineering.
2012 (English)MasteroppgaveStudent thesis
Abstract [en]

Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance. Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.

Place, publisher, year, edition, pages
Institutt for materialteknologi , 2012. , 52 p.
Keyword [no]
ntnudaim:8218, MTMT Materialteknologi, Materialer og energiteknologi
URN: urn:nbn:no:ntnu:diva-19017Local ID: ntnudaim:8218OAI: diva2:566402
Available from: 2012-11-08 Created: 2012-11-08

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