Towards new interferometer technology for surface metrology
2012 (English)In: Proceedings of the 12th international conference of the europeansociety for precision engineering and nanotechnology, June 4th – 7th 2012, Stockholm, Sweden / [ed] P. Shore, H. Spaan & T. Burke, Cranfield, Bedfordshire, UK: euspen , 2012, Vol. 1, 158-161 p.Conference paper (Refereed)
There is an increasing requirement from manufacturing industries for improved technologies to measure surface topography. New instruments have to be accurate; robust to be used on the industry floor; non-invasive; automatic; and sufficiently fast to be used in real time as well as to simultaneously measure over a large area. The industrial applications are plenty:
- On-line quality control of machined parts,
- Direct feed back to the manufacturing process,
- Analysis and selection of surface texture/structure.
This paper presents new developments in interferometer techniques for new robust area-based topographic instruments.
Place, publisher, year, edition, pages
Cranfield, Bedfordshire, UK: euspen , 2012. Vol. 1, 158-161 p.
interferometry; surface metrology
Tribology Nano Technology
IdentifiersURN: urn:nbn:se:hh:diva-19612ISBN: 978-0-9566790-0-0OAI: oai:DiVA.org:hh-19612DiVA: diva2:552460
12th international conference of the european society for precision engineering and nanotechnology, June 4th – 7th, 2012, Stockholm, Sweden
FunderEU, FP7, Seventh Framework Programme