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Towards New Interferometer Technology for Surface Metrology
Halmstad University, School of Business, Engineering and Science, Mechanical Engineering and Industrial Design (MTEK), Fotonik.ORCID iD: 0000-0002-4826-019X
Halmstad University, School of Business, Engineering and Science, Mechanical Engineering and Industrial Design (MTEK), Functional Surfaces.ORCID iD: 0000-0001-8058-1252
2012 (English)In: Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology: June 4th - 7th [8th] 2012, Stockholm, Sweden. Vol. 1 / [ed] P. Shore, H. Spaan & T. Burke, Bedford: EUSPEN , 2012, Vol. 1, 158-161 p.Conference paper, Published paper (Refereed)
Abstract [en]

There is an increasing requirement from manufacturing industries for improved technologies to measure surface topography. New instruments have to be accurate; robust to be used on the industry floor; non-invasive; automatic; and sufficiently fast to be used in real time as well as to simultaneously measure over a large area. The industrial applications are plenty:

  • On-line quality control of machined parts,
  • Direct feed back to the manufacturing process,
  • Analysis and selection of surface texture/structure.

This paper presents new developments in interferometer techniques for new robust area-based topographic instruments.

Place, publisher, year, edition, pages
Bedford: EUSPEN , 2012. Vol. 1, 158-161 p.
Keyword [en]
interferometry, surface metrology
National Category
Tribology Nano Technology
Identifiers
URN: urn:nbn:se:hh:diva-19612Scopus ID: 2-s2.0-84911430647ISBN: 978-0-9566790-0-0 (print)OAI: oai:DiVA.org:hh-19612DiVA: diva2:552460
Conference
12th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2012), June 4th-7th, 2012, Stockholm, Sweden
Funder
EU, FP7, Seventh Framework Programme
Available from: 2012-09-17 Created: 2012-09-14 Last updated: 2017-04-27Bibliographically approved

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