Assessment of optical coherence tomography for metrology applications in high-scattering ceramic materials
2012 (English)Licentiate thesis, comprehensive summary (Other academic)
Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects.
In this work, alumina ceramic samples are evaluated by optical coherence tomography (OCT) operating at 1.3μm wavelength and some dimensional data are obtained by dedicated image processing and segmentation. Layer thicknesses can be measured and laser-machined channels can be verified embedded at around 100μm depth. Moreover, detection of internal defects is enabled.
Monte Carlo ray tracing simulations are employed to analyze the abilities of OCT in imaging of the embedded channels. The light scattering mechanism is studied for the alumina ceramics, and different scattering origins and models are discussed. The scattering parameters required as input data for simulations are evaluated from the integrating sphere measurements of collimated and diffuse transmittance spectra using a reconstruction algorithm based on refined diffusion approximation approach.
Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2012. , vii, 61 p.
Trita-IIP, ISSN 1650-1888 ; 2012:07
metrology, optical coherence tomography, alumina ceramics, nondestructive testing, imaging through turbid media, light scattering, image processing, numerical approximation and analysis, Monte Carlo method
Engineering and Technology
IdentifiersURN: urn:nbn:se:kth:diva-98621ISBN: 978-91-7501-398-5OAI: oai:DiVA.org:kth-98621DiVA: diva2:538013
2012-06-08, Sal M311, KTH, Brinellvägen 68, Stockholm, 14:00 (English)
Granberg, Hjalmer, Tekn. Dr
FunderXPRES - Initiative for excellence in production research
QC 201206282012-06-282012-06-282014-04-28Bibliographically approved
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