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A Combinatorial Chemistry Approach to the Amorphous Al-In-Zn-O Transparent Oxide Semiconductor System
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.
2012 (English)Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

This report describes the successful application of a combinatorial chemistry approach to the evaluation of the amorphous transparent oxide semiconductor Al-In-Zn-O, a-AIZO, for use as channel layers in thin film transistors, TFTs. Many technologies, such as computing and electronic displays, rely on the use of the transistor. In particular, for flat panel displays, the development of new TFTs for the control electronics are necessary for thinner displays with better resolution. In addition, transparent materials deposited at low temperatures would enable a new range of applications. To accomplish this, new materials for the TFT channel layer are needed.

Transparent oxide semiconductors (TOS) are one alternative the silicon based materials currently in use and the first TOS, amorphous In-Ga-Zn-O, has just gone into production. However, despite its good properties, it suffers from the disadvantage of containing the scarce and expensive metals In and Ga. Several attempts have been made to replace Ga with Al but no systematic study of a-AIZO has been reported. This report describes such a study, using a method known as combinatorial chemistry.

Initially, a-AIZO thin films with composition gradients were deposited by DC/RF magnetron sputtering and, following characterization, TFTs with a variety of a-AIZO channel layer composition were manufactured and investigated. Two different compositional areas were found to yield TFTs with good characteristics.

Place, publisher, year, edition, pages
2012. , 46 p.
Keyword [en]
Transparent oxide semiconductors, TOS, amorphous TOS, TAOS, combinatorial chemistry, Al-In-Zn-O, AIZO, a-AIZO, IAZO
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-78673ISRN: LITH-IFM-A-EX--12-2694--SEOAI: diva2:534668
External cooperation
Sumitomo Electric Industries Ltd.
Subject / course
2012-06-15, Jordan Fermi, Fysikhuset, Linköpings universitet, 581 83, Linköping, 15:15 (English)
Physics, Chemistry, Mathematics
Available from: 2012-06-26 Created: 2012-06-18 Last updated: 2012-06-26Bibliographically approved

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