Fabrication and transfer of fragile 3D PDMS microstructures
2012 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 22, no 8, 1-9 p.Article in journal (Refereed) Published
We present a method for PDMS microfabrication of fragile membranes and 3D fluidic networks, using a surface modified water-dissolvable release material, poly(vinyl alcohol), as a tool for handling, transfer and release of fragile polymer microstructures. The method is well suited for the fabrication of complex multilayer microfluidic devices, here shown for a PDMS device with a thin gas permeable membrane and closely spaced holes for vertical interlayer connections fabricated in a single layer. To the authors knowledge, this constitutes the most advanced PDMS fabrication method for the combination of thin, fragile structures and 3D fluidics networks, and hence a considerable step in the direction of making PDMS fabrication of complex microfluidic devices a routine endeavour.
Place, publisher, year, edition, pages
2012. Vol. 22, no 8, 1-9 p.
Microfluidic Devices, Layer
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-95357DOI: 10.1088/0960-1317/22/8/085009ISI: 000306649000009ScopusID: 2-s2.0-84864447006OAI: oai:DiVA.org:kth-95357DiVA: diva2:527942
QC 201506242012-05-232012-05-232016-01-22Bibliographically approved