Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
2012 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 12, no 8, 2653-2654 p.Article in journal (Refereed) Published
Aluminum nitride thin film bulk wave resonant pressure sensors employing c- and tilted c-axis texture, have been fabricated and tested for their pressure sensitivities. The c-axis tilted FBAR pressure sensors demonstrate substantially higher pressure sensitivity compared to its c-axis oriented counterpart. More specifically the thickness plate quasi-shear resonance has demonstrated the highest pressure sensitivity while further being able to preserve its performance in liquid environment.
Place, publisher, year, edition, pages
2012. Vol. 12, no 8, 2653-2654 p.
AlN, FBAR, pressure sensor, sensitivity, micro-acoustic
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-173179DOI: 10.1109/JSEN.2012.2199482ISI: 000305584300003OAI: oai:DiVA.org:uu-173179DiVA: diva2:516832