A low-power high-flow shape memory alloy wire gas microvalve
2012 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 22, no 7, 1-10 p.Article in journal (Refereed) Published
In this paper the use of shape memory alloy (SMA) wire actuators for high gas flow control is investigated. A theoretical model for effective gas flow control is presented and gate microvalve prototypes are fabricated. The SMA wire actuator demonstrates the robust flow control of more than 1600 sccm at a pressure drop of 200 kPa. The valve can be successfully switched at over 10 Hz and at an actuation power of 90 mW. Compared to the current state-of-the-art high-flow microvalves, the proposed solution benefits from a low-voltage actuator with low overall power consumption. This paper demonstrate that SMA wire actuators are well suited for high-pressurehigh-flow applications.
Place, publisher, year, edition, pages
Institute of Physics (IOP), 2012. Vol. 22, no 7, 1-10 p.
MICROACTUATORS, PRESSURE, SILICON
IdentifiersURN: urn:nbn:se:kth:diva-90852DOI: 10.1088/0960-1317/22/7/075002ISI: 000305890600016ScopusID: 2-s2.0-84863831072OAI: oai:DiVA.org:kth-90852DiVA: diva2:506886
QC 201506182012-03-012012-03-012015-06-25Bibliographically approved