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A low-power high-flow shape memory alloy wire gas microvalve
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
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2012 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 22, no 7, 1-10 p.Article in journal (Refereed) Published
Abstract [en]

In this paper the use of shape memory alloy (SMA) wire actuators for high gas flow control is investigated. A theoretical model for effective gas flow control is presented and gate microvalve prototypes are fabricated. The SMA wire actuator demonstrates the robust flow control of more than 1600 sccm at a pressure drop of 200 kPa. The valve can be successfully switched at over 10 Hz and at an actuation power of 90 mW. Compared to the current state-of-the-art high-flow microvalves, the proposed solution benefits from a low-voltage actuator with low overall power consumption. This paper demonstrate that SMA wire actuators are well suited for high-pressurehigh-flow applications.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2012. Vol. 22, no 7, 1-10 p.
Keyword [en]
MICROACTUATORS, PRESSURE, SILICON
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:kth:diva-90852DOI: 10.1088/0960-1317/22/7/075002ISI: 000305890600016Scopus ID: 2-s2.0-84863831072OAI: oai:DiVA.org:kth-90852DiVA: diva2:506886
Note

QC 20150618

Available from: 2012-03-01 Created: 2012-03-01 Last updated: 2017-12-07Bibliographically approved
In thesis
1. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves
Open this publication in new window or tab >>Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves
2012 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets.

The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. The use of SMAs in MEMS has so far been limited, partially due to a lack of cost efficient and reliable wafer-level integration approaches. This thesis presents new methods for wafer-level integration of nickel-titanium SMA sheets and wires. For SMA sheets, a technique for the integration of patterned SMA sheets to silicon wafers using gold-silicon eutectic bonding is demonstrated. A method for selective release of gold-silicon eutectically bonded microstructures by localized electrochemical etching, is also presented. For SMA wires, alignment and placement of NiTi wires is demonstrated forboth a manual approach, using specially built wire frame tools, and a semiautomatic approach, using a commercially available wire bonder. Methods for fixing wires to wafers using either polymers, nickel electroplating or mechanical silicon clamps are also shown. Nickel electroplating offers the most promising permanent fixing technique, since both a strong mechanical and good electrical connection to the wire is achieved during the same process step. Resistively heated microactuators are also fabricated by integrating prestrained SMA wires onto silicon cantilevers. These microactuators exhibit displacements that are among the highest yet reported. The actuators also feature a relatively low power consumption and high reliability during longterm cycling.

New designs for gas microvalves are presented and valves using both SMA sheets and SMA wires for actuation are fabricated. The SMA-sheet microvalve exhibits a pneumatic performance per footprint area, three times higher than that of previous microvalves. The SMA-wire-actuated microvalve also allows control of high gas flows and in addition, offers benefits of lowvoltage actuation and low overall power consumption.

Place, publisher, year, edition, pages
Stockholm: KTH Royal Institute of Technology, 2012. viii, 79 p.
Series
Trita-EE, ISSN 1653-5146 ; 2012:014
Keyword
Microelectromechanical systems, MEMS, silicon, wafer-level, integration, heterogeneous integration, wafer bonding, Au-Si, eutectic bonding, release etching, electrochemical etching, microvalves, microactuators, shape memory alloy, SMA, NiTinol, TiNi, NiTi, cold-state reset, bias spring, gate valves, wire bonding
National Category
Engineering and Technology
Identifiers
urn:nbn:se:kth:diva-94088 (URN)978-91-7501-304-6 (ISBN)
Public defence
2012-06-01, sal E3, Osquarsbacke 14, KTH, Stockholm, 10:00 (English)
Opponent
Supervisors
Note
QC 20120514Available from: 2012-05-14 Created: 2012-05-07 Last updated: 2012-05-14Bibliographically approved

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