Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Metrology of micro-components – a real challenge for the future
KTH, School of Industrial Engineering and Management (ITM), Production Engineering, Metrology and Optics.ORCID iD: 0000-0002-0105-4102
2006 (English)In: Proceedings of the 5th International Seminar on Intelligent Computation in Manufacturing Engineering (CIRP ISME ’06) / [ed] R. Teti, CIRP , 2006, 547-552 p.Conference paper, Published paper (Refereed)
Abstract [en]

Micro manufacturing is steadily advancing from research labs to spin off companies. Products formerly manufactured by thin film technology using semiconductor processes are being replaced by more efficient full 3D micro manufacturing techniques. Materials have expanded to polymers, metals and ceramics. From being wafer based structures of tens of microns in width and a thickness of up to a micron, feature sizes are now a few microns wide and hundreds of microns deep. This puts very high demands on the geometrical dimensional and roughness measurement tools of the future. This paper gives a review of current metrology tools available for dimensional and surface characterization, and their limitations. It will also present the requirements of future instruments and discuss potential techniques to solve these issues.

Place, publisher, year, edition, pages
CIRP , 2006. 547-552 p.
Keyword [en]
Micro metrology, high aspect ratio, CMM, optical probe, surface roughness, micro manufacture
National Category
Production Engineering, Human Work Science and Ergonomics Nano Technology
Research subject
SRA - Production
Identifiers
URN: urn:nbn:se:kth:diva-85470OAI: oai:DiVA.org:kth-85470DiVA: diva2:500049
Conference
CIRP ISME ’06, 25 – 28 July 2006, Ischia, Italy
Projects
4M Multi Material Micro Manufacture Network of Excellence
Funder
XPRES - Initiative for excellence in production research
Note
QC 20120217Available from: 2012-02-17 Created: 2012-02-13 Last updated: 2012-02-17Bibliographically approved

Open Access in DiVA

Metrology of micro-components – a real challenge for the future 2006(402 kB)1385 downloads
File information
File name FULLTEXT01.pdfFile size 402 kBChecksum SHA-512
aa6a4b31794955d0267e649d66e58e148d3adaa07b942a1553a722c823fc32a9a4d2fe7a0aa0527887a4558879f4960a3ad4de3faaa7a567fa8a94a13fb541ed
Type fulltextMimetype application/pdf

Search in DiVA

By author/editor
Mattsson, Lars
By organisation
Metrology and Optics
Production Engineering, Human Work Science and ErgonomicsNano Technology

Search outside of DiVA

GoogleGoogle Scholar
Total: 1385 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 187 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf