Change search
ReferencesLink to record
Permanent link

Direct link
Polytype formation in sublimation epitaxy of SiC on low off-axis substrates.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
2011 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

Sublimation epitaxy of SiC on low off-axis substrates was performed. The growth was performed at different temperatures, mainly under vacuum conditions or with an initial atmosphere of N2 at 0.5 mbar (RT). Some additional experiments under different conditions (Ar background, higher temperature, higher off-axis substrate) were performed in order to further investigate growth influencing factors. The samples were characterized by optical microscopy and atomic force microscopy. A dependence of 3C/6H growth on substrate off-axis, as well as on temperature, was clear to be seen. Favored growth of 6H in the presence of N2 was found.  An enlargement effect on the 3C domains grown in N2 ambient was observed. Additionally a correlation between step bunching and growth rate was found in step flow growth on low off-axis substrates. Suggestions for relevant growth mechanisms are made. Further work is discussed.

Place, publisher, year, edition, pages
2011. , 49 p.
Keyword [en]
Sublimation, epitaxy, SiC, polytype
National Category
Other Materials Engineering
URN: urn:nbn:se:liu:diva-74414ISRN: LITH-IFM-A-EX--11/2555--SEOAI: diva2:484028
Subject / course
Available from: 2012-01-27 Created: 2012-01-26 Last updated: 2012-01-27Bibliographically approved

Open Access in DiVA

Polytype formation in sublimation epitaxy of SiC on low off-axis substrates.(1955 kB)224 downloads
File information
File name FULLTEXT01.pdfFile size 1955 kBChecksum SHA-512
Type fulltextMimetype application/pdf

By organisation
Semiconductor MaterialsThe Institute of Technology
Other Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 224 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 142 hits
ReferencesLink to record
Permanent link

Direct link