Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Development of a suspended, robust, thermally insulated micro chamber of thick silicon dioxide for microthrusters and micoreactors
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Show others and affiliations
2011 (English)In: PowerMEMS 11 Technical digest: The 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications / [ed] Young-Ho Cho, 2011, 62-65 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2011. 62-65 p.
National Category
Other Materials Engineering
Research subject
Engineering Science with specialization in Materials Science
Identifiers
URN: urn:nbn:se:uu:diva-164831ISBN: 978-89-967591-0-2 (print)OAI: oai:DiVA.org:uu-164831DiVA: diva2:470267
Conference
PowerMEMS 2011, Nov 15-18, Seoul, Republic of Korea
Available from: 2012-01-04 Created: 2011-12-28 Last updated: 2016-04-20Bibliographically approved

Open Access in DiVA

pmems11(420 kB)316 downloads
File information
File name FULLTEXT01.pdfFile size 420 kBChecksum SHA-512
84344763e033f0c7fe5cd6597fdf8944a61b2761817ddcea72766a47ef9a1a59842749f12a409f1688007f41521f77985ad65ec48046108ebb83898b3a23f199
Type fulltextMimetype application/pdf

Search in DiVA

By author/editor
Palmer, KristofferLekholm, VilleKratz, HenrikNguyen, HugoThornell, Greger
By organisation
Microsystems Technology
Other Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 316 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

isbn
urn-nbn

Altmetric score

isbn
urn-nbn
Total: 901 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf