Ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge
2005 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 38, no 18, 3417-3421 p.Article in journal (Refereed) Published
We report on the creation and propagation of ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge. A dense localized plasma is created by applying high energy pulses (4-12 J) of length; approximate to 70 mu s, at a repetition frequency of 50 pulses per second, to a planar magnetron sputtering source. The temporal behaviour of the electron density, measured by a Langmuir probe, shows solitary waves travelling away from the magnetron target. The velocity of the waves depends on the gas pressure but is roughly independent of the pulse energy.
Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2005. Vol. 38, no 18, 3417-3421 p.
PLASMA PARAMETERS; SOLITONS; IONIZATION; EXCITATION; DEPOSITION; FILMS
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-53070DOI: 10.1088/0022-3727/38/18/015ISI: 000232452900016OAI: oai:DiVA.org:kth-53070DiVA: diva2:468836
QC 201201022012-01-022011-12-212012-01-02Bibliographically approved