Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Fabrication and Characterization of Micro and Nano Scale SiC UV Photodetectors
KTH, School of Information and Communication Technology (ICT).
2011 (English)Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

The focus of this master thesis work is on the fabrication of micro- and nano-scale metalsemiconductor-metal silicon carbide (SiC) UV photodetectors and subsequent electrical and optical evaluation of the fabricated devices. The UV photodetectors have significant potential to address the needs of many applications such as detection of corona discharge and flames, industrial machine viewing, and bacteria in water or paper mills.

Micro-scale devices in 4H-SiC and 6H-SiC have been fabricated successfully with good photoresponse and low dark current. Reduction in size of the 4H-SiC UV detectors from micro-scale to nano-scale has been achieved by the use of nano imprint lithography (NIL). The performance of these nano-devices have been characterized, and experiment results reveal good photo sensitivity at very low applied biases.

Place, publisher, year, edition, pages
2011. , 74 p.
Series
Trita-ICT-EX, 264
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:kth:diva-52911OAI: oai:DiVA.org:kth-52911DiVA: diva2:468210
Subject / course
Microelectronics and Applied Physics
Educational program
Master of Science in Engineering - Microelectronics
Uppsok
Technology
Examiners
Available from: 2011-12-20 Created: 2011-12-20 Last updated: 2011-12-20Bibliographically approved

Open Access in DiVA

fulltext(6134 kB)279 downloads
File information
File name FULLTEXT01.pdfFile size 6134 kBChecksum SHA-512
d66bf926901b97585f6a2c4c286fcbe8337ac0dded6eb65e25d8fdcb57a7dd2827d622f7baa7df605fd0bee684cb98d6e54892d6849ff4b15353142feeee4d60
Type fulltextMimetype application/pdf

By organisation
School of Information and Communication Technology (ICT)
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
Total: 279 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 286 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf