Ceramic cold gas microthruster with integrated flow sensor
2011 (English)In: PowerMEMS 2011 Technical digest: The 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications / [ed] Young-Ho Cho, Daejeon, Republic of Korea: Cell Bench Research Center, KAIST , 2011, 167-170 p.Conference paper (Refereed)
For aggressive environments, the material properties of silicon become a limitation. Macroscopically, ceramics are as common for high-temperature applications as is silicon in miniaturized systems, but this group of materials has been little exploited for MEMS components. This paper describes the design, manufacturing and characterization of a ceramic, heated cold-gas microthruster with integrated flow sensor, using HTCC processing and silicon tools. The calorimetric flow sensor is integrated in the structure, and heaters are embedded in the stagnation chamber of the nozzle. The heater was shown to improve the efficiency of the thruster, as confirmed by measurements of the flow rate. Flow rate changes were seen as changes in resistance of the fabricated flow sensor. The choice of yttria stabilized zirconia as material for the components make them robust and capable of withstanding very high temperatures. Samples have been shown capable of achieving temperatures locally exceeding 1000ºC.
Place, publisher, year, edition, pages
Daejeon, Republic of Korea: Cell Bench Research Center, KAIST , 2011. 167-170 p.
HTCC, MEMS, microthruster, microfluidics
Ceramics Fluid Mechanics and Acoustics
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-164386ISBN: 978-89-967591-0-2OAI: oai:DiVA.org:uu-164386DiVA: diva2:467881
PowerMEMS 2011, Nov 15-18, Seoul, Republic of Korea