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Ceramic cold gas microthruster with integrated flow sensor
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
2011 (English)In: PowerMEMS 2011 Technical digest: The 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications / [ed] Young-Ho Cho, Daejeon, Republic of Korea: Cell Bench Research Center, KAIST , 2011, p. 167-170Conference paper, Published paper (Refereed)
Abstract [en]

For aggressive environments, the material properties of silicon become a limitation. Macroscopically, ceramics are as common for high-temperature applications as is silicon in miniaturized systems, but this group of materials has been little exploited for MEMS components. This paper describes the  design, manufacturing and characterization of a ceramic, heated cold-gas microthruster with integrated flow sensor, using HTCC processing and silicon tools. The calorimetric flow sensor is integrated in the structure, and heaters are embedded in the stagnation chamber of the nozzle. The heater was shown to improve the efficiency of the thruster, as confirmed by measurements of the flow rate. Flow rate changes were seen as changes in resistance of the fabricated flow sensor. The choice of yttria stabilized zirconia as material for the components make them robust and capable of withstanding  very high temperatures. Samples have been shown  capable of achieving temperatures locally exceeding 1000ºC.

Place, publisher, year, edition, pages
Daejeon, Republic of Korea: Cell Bench Research Center, KAIST , 2011. p. 167-170
Keyword [en]
HTCC, MEMS, microthruster, microfluidics
National Category
Ceramics Fluid Mechanics and Acoustics
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-164386ISBN: 978-89-967591-0-2 (print)OAI: oai:DiVA.org:uu-164386DiVA: diva2:467881
Conference
PowerMEMS 2011, Nov 15-18, Seoul, Republic of Korea
Available from: 2012-01-04 Created: 2011-12-20 Last updated: 2013-03-21Bibliographically approved

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