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Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters
KTH, School of Electrical Engineering (EES), Microsystem Technology. (RF MEMS)ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering (EES), Microsystem Technology. (RF MEMS)
KTH, School of Electrical Engineering (EES), Microsystem Technology. (RF MEMS)
2011 (English)In: 6th European Microwave Integrated Circuits (EuMIC) Conference, The European Microwave Association , 2011, 526-529 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper presents for the first time MEMS tuneablefilters, where the reconfiguration of the filter is achieved bymoving the sidewalls of a 3D micromachined transmission line.The sidewalls of the transmission line are moved by MEMSelectrostatic actuators completely integrated into the groundlayers of a thick-film coplanar waveguide. Multi-step actuatorshave been utilized for achieving a tuning range of up to 2.41 forthe tuneable capacitance elements. Two different 3Dtransmission line metallization schemes and two differentconcepts for tuning the capacitive load have been investigatedfor constructing filters based on this novel tuning mechanism.Measurements of fabricated devices have revealed that 3Dtransmission lines with top metallization only, and capacitorsavoiding the routing of the RF signal over mechanical-springmeanders achieve the best results. A successfully implementedfilter based on this configuration is shown, with a passbandinsertion and return loss of 5 and 12 dB, respectively, at a centerfrequency of 20 GHz. Various MEMS actuators designs withspring constants from 3.5 to 95 N/m have been implemented,resulting in actuation voltages of 15.4 to 73 V. The self-actuationpower simulated in a non-linear Agilent Advanced DesignSystem model has been estimated to 40 and 50 dBm for the softand the stiff spring actuators, respectively. The fabrication isdone by a single-mask silicon-on-insulator RF MEMS process.

Place, publisher, year, edition, pages
The European Microwave Association , 2011. 526-529 p.
Keyword [en]
RF MEMS, tuneable filters, micromachined transmission lines
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-50164Scopus ID: 2-s2.0-84855809863OAI: oai:DiVA.org:kth-50164DiVA: diva2:461175
Conference
6th European Microwave Integrated Circuits (EuMIC) Conference
Note
QC 20111213Available from: 2011-12-13 Created: 2011-12-02 Last updated: 2011-12-13Bibliographically approved

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Shah, UmerSterner, MikaelOberhammer, Joachim
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CiteExportLink to record
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