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Dry Transfer Bonding of Porous Silicon Membranes to OSTE(+) Polymer Microfluidic Devices
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0001-9008-8402
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).ORCID iD: 0000-0002-0441-6893
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2012 (English)In: Proceedings IEEE International Conference on Micro Electro MechanicalSystems (MEMS), IEEE , 2012, 232-234 p.Conference paper, Published paper (Refereed)
Abstract [en]

We present low temperature transfer bonding of porous silicon membranes to polymeric microfluidic devices, using neither adhesives nor bond surface treatment. The transfer is enabled by a novel dual cure ternary monomer system containing thiolene and epoxy. The ability of the epoxy to react with almost any dry substrate provides a very versatile fabrication method. We characterize the two stage curing mechanism, describe the device fabrication, and evaluate the bond strength.

Place, publisher, year, edition, pages
IEEE , 2012. 232-234 p.
Series
Proceedings IEEE Micro Electro Mechanical Systems, ISSN 1084-6999
Keyword [en]
Fluidic devices, Polymers, Porous silicon
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-49010DOI: 10.1109/MEMSYS.2012.6170133ISI: 000312912800059Scopus ID: 2-s2.0-84860477442ISBN: 978-978-1-4673-0325-5 (print)OAI: oai:DiVA.org:kth-49010DiVA: diva2:459129
Conference
25th IEEE International Conference on Micro Electro Mechanical Systems, Paris, France, January, 2012
Projects
Positive
Note

© 2012 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. QC 2011

Available from: 2012-02-22 Created: 2011-11-24 Last updated: 2013-02-01Bibliographically approved

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Saharil, FarizahGylfason, Kristinn B.Liu, YitongHaraldsson, TommyWijngaart, Wouter van der
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