Optical coherence tomography: a potential tool for roughness assessment of free and embedded surfaces of laser-machined alumina ceramic
2011 (English)In: Proceedings of the 8th International Conference on Multi-Material Micro Manufacture / [ed] Heinz Kuck, Holger Reinecke and Stefan Dimov, Singapore: Research Publishing , 2011, 140-144 p.Conference paper (Refereed)
For an emerging market a mass and cost-effective production of non-silicon micro devices requires an in-process and accurate 3D monitoring to assure the quality. Optical coherence tomography (OCT) providing high-resolution contactless imaging is used to inspect the surface quality of a laser-machined alumina ceramic layer. Quantitatively the root mean square (rms) roughness is measured by traditional means and provides input parameters to theMonte Carlosimulation of OCT method. We found that the quality of both free and embedded surfaces of the highly-scattering alumina ceramic material can be evaluated by OCT.
Place, publisher, year, edition, pages
Singapore: Research Publishing , 2011. 140-144 p.
Alumina ceramics, optical coherence tomography (OCT), light scattering, surface roughness, Monte Carlo method, laser machining
Engineering and Technology
Research subject SRA - Production
IdentifiersURN: urn:nbn:se:kth:diva-48468DOI: 10.3850/978-981-07-0319-6_247ISI: 000307677000030ISBN: 978-981-07-0319-6OAI: oai:DiVA.org:kth-48468DiVA: diva2:458056
4M 2011 conference
ProjectsMultilayer project (FP7-NMP4-2007-214122)
FunderEU, FP7, Seventh Framework Programme, FP7-NMP4-2007-214122XPRES - Initiative for excellence in production research
QC 201112212011-12-212011-11-182014-04-28Bibliographically approved