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Hermetic integration of liquids in MEMS by room temperature, high-speed plugging of liquid-filled cavities at wafer level
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0002-0525-8647
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0001-9552-4234
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2011 (English)In: Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE , 2011, 356-359 p.Conference paper, Published paper (Other academic)
Abstract [en]

This paper reports a novel room temperature hermetic liquid sealing process based on wire bonded "plugs" over the access ports of liquid-filled cavities. The method enables liquids to be integrated already at the fabrication stage. Test vehicles were manufactured and used to investigate the mechanical and hermetic properties of the seals. A helium leak rate of better than 1E-10 mbarL/s was measured on the successfully sealed structures. The bond strength of the "plugs" were similar to standard wire bonds on flat surfaces.

Place, publisher, year, edition, pages
IEEE , 2011. 356-359 p.
Series
Proceedings: IEEE micro electro mechanical systems, ISSN 1084-6999
Keyword [en]
Bonding, Cavity resonators, Gold, Micromechanical devices, Seals, Silicon, Wire
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-47360DOI: 10.1109/MEMSYS.2011.5734435ISI: 000295841200088Scopus ID: 2-s2.0-79953780865OAI: oai:DiVA.org:kth-47360DiVA: diva2:454846
Conference
International Conference on Micro Electro Mechanical Systems (MEMS)
Note
Poster presentation. © 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. QC 20111110Available from: 2011-11-10 Created: 2011-11-08 Last updated: 2011-11-15Bibliographically approved

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Fischer, AndreasNiklaus, FrankStemme, Göran

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