Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
2011 (English)In: Sensors, ISSN 1424-8220, E-ISSN 1424-8220, Vol. 11, no 7, 6942-6953 p.Article in journal (Refereed) Published
The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.
Place, publisher, year, edition, pages
2011. Vol. 11, no 7, 6942-6953 p.
resonator, aluminum nitride, membrane, HMDSO, gravimetric, sensitivity
Engineering and Technology
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-157836DOI: 10.3390/s110706942ISI: 000293069200027OAI: oai:DiVA.org:uu-157836DiVA: diva2:436457
ProjectsVR "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"