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Process modelling for reactive magnetron sputtering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films)
2011 (English)In: Potential and Applications of Thin Ceramic and Metal Coatings 2011. 2nd PATCMC, 6th - 8th June, 2011 Plzeň, Czech Republic / [ed] Pavel Baroch, Milan Kubasek, Plzen: University of West Bohemia , 2011, 25-28 p.Conference paper, Published paper (Refereed)
Abstract [en]

Reactive magnetron sputtering is a widely used technique for deposition of various compound thin films such as oxides and nitrides. This contribution deals with process modelling for reactive sputtering. A brief discussion of the hysteresis effect and classical Berg’s model is presented, followed by examples of application. Finally, some current topics in reactive sputtering are presented.

Place, publisher, year, edition, pages
Plzen: University of West Bohemia , 2011. 25-28 p.
Keyword [en]
reactive sputtering, magnetron sputtering, thin films
National Category
Other Engineering and Technologies
Research subject
Engineering Science; Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-154740ISBN: 978-80-261-0009-6 (print)OAI: oai:DiVA.org:uu-154740DiVA: diva2:432405
Conference
2nd PATCMC, 6th - 8th June, 2011 Plzeň, Czech Republic
Projects
VWIII
Available from: 2011-08-04 Created: 2011-06-10 Last updated: 2012-01-25Bibliographically approved

Open Access in DiVA

fulltext(233 kB)273 downloads
File information
File name FULLTEXT03.pdfFile size 233 kBChecksum SHA-512
8a1d246bb451a4d48e18c70fe945ca0d10bdbe750c32e89c230f905c15338e3bfd605e284145bfb4529bdf7ab7124937129787685b790b7de0629f31c6c5c94c
Type fulltextMimetype application/pdf

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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf