Heterogeneous Integration for Optical MEMS
2010 (English)In: 2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY, NEW YORK: IEEE , 2010, 487-488 p.Conference paper (Refereed)
In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various monocrystalline silicon micro-mirror arrays and infrared bolometer arrays.
Place, publisher, year, edition, pages
NEW YORK: IEEE , 2010. 487-488 p.
MEMS, micro-opto-electromechanical system, MOEMS, More-than-Moore, photonics integration, self assembly, wafer-level heterogeneous integration, wafer-scale IC integration
Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-32030DOI: 10.1109/PHOTONICS.2010.5698973ISI: 000287997500244ScopusID: 2-s2.0-79951901323ISBN: 978-1-4244-5369-6OAI: oai:DiVA.org:kth-32030DiVA: diva2:408630
23rd Annual Meeting of the IEEE Photonics-Society, Denver, CO, NOV 07-11, 2010
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QC 201104052011-11-172011-04-042011-11-17Bibliographically approved