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Heterogeneous Integration for Optical MEMS
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0003-3452-6361
KTH, School of Electrical Engineering (EES), Microsystem Technology.ORCID iD: 0000-0002-9820-8728
KTH, School of Electrical Engineering (EES), Microsystem Technology.
KTH, School of Electrical Engineering (EES), Microsystem Technology.
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2010 (English)In: 2010 23RD ANNUAL MEETING OF THE IEEE PHOTONICS SOCIETY, NEW YORK: IEEE , 2010, 487-488 p.Conference paper, Published paper (Refereed)
Abstract [en]

In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various monocrystalline silicon micro-mirror arrays and infrared bolometer arrays.

Place, publisher, year, edition, pages
NEW YORK: IEEE , 2010. 487-488 p.
Keyword [en]
MEMS, micro-opto-electromechanical system, MOEMS, More-than-Moore, photonics integration, self assembly, wafer-level heterogeneous integration, wafer-scale IC integration
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-32030DOI: 10.1109/PHOTONICS.2010.5698973ISI: 000287997500244Scopus ID: 2-s2.0-79951901323ISBN: 978-1-4244-5369-6 (print)OAI: oai:DiVA.org:kth-32030DiVA: diva2:408630
Conference
23rd Annual Meeting of the IEEE Photonics-Society, Denver, CO, NOV 07-11, 2010
Note
© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. QC 20110405Available from: 2011-11-17 Created: 2011-04-04 Last updated: 2011-11-17Bibliographically approved

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