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Deposition and Phase Transformations of Ternary Al-Cr-O Thin Films
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
2011 (English)Licentiate thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis concerns the ternary Al-Cr-O system. (Al1-xCrx)2O3 solid solution thin films with 0.6<x<0.7 were deposited on Si(001) substrates at temperatures of 400-500 °C by reactive radio frequency magnetron sputtering from metallic targets of Al and Cr in a flow controlled Ar / O2 gas mixture. As-deposited and annealed (Al1-xCrx)2O3 thin films were analyzed by x-ray diffraction, elastic recoil detection analysis, scanning electron microscopy, transmission electron microscopy, and nanoindentation. (Al1-xCrx)2O3 showed to have face centered cubic structure with lattice parameter of 4.04 Å, which is in contrast to the typical corundum structure reported for these films. The as-deposited films exhibited hardness of ~ 26 GPa and elastic modulus of 220-235 GPa. Phase transformation from cubic to corundum (Al0.32Cr0.68)2O3 starts at 925 °C. Annealing at 1000 °C resulted in complete phase transformation, while no precipitates of alumina and chromia were observed. Studies on kinetics of phase transformation showed a two-step thermally activated process; phase transformation and grain growth with the apparent activation energies 213±162 and 945±27 kJ/mol, respectively.

Place, publisher, year, edition, pages
Linköping: Linköping University Electronic Press , 2011. , 29 p.
Series
Linköping Studies in Science and Technology. Thesis, ISSN 0280-7971 ; 1474
Keyword [en]
Thin Films, Hard Coatings
National Category
Other Physics Topics
Identifiers
URN: urn:nbn:se:liu:diva-65700Local ID: LIU-TEK-LIC-2011:13ISBN: 978-91-7393-210-3 (print)OAI: oai:DiVA.org:liu-65700DiVA: diva2:398426
Presentation
2011-04-15, Hörsal Planck, Fysikhuset, Campus Valla, Linköpings universitet, Linköping, 10:15 (English)
Opponent
Supervisors
Available from: 2011-12-05 Created: 2011-02-17 Last updated: 2016-08-31Bibliographically approved
List of papers
1. Face-Centered Cubic (Al1-xCrx)2O3
Open this publication in new window or tab >>Face-Centered Cubic (Al1-xCrx)2O3
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2011 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 519, no 8, 2426-2429 p.Article in journal (Refereed) Published
Abstract [en]

We report the discovery of a face-centered cubic (Al1−xCrx)2O3 solid solution [0.60bxb0.70] in films grownonto Si substrates using reactive radio frequency magnetron sputtering from Al and Cr targets at 400 °C. Theproposed structure is NaCl-like with 33% vacancies on the metal sites. The unit cell parameter is 4.04 Å asdetermined by X-ray diffraction. The films have a b100N preferred crystallographic orientation and exhibithardness values up to 26 GPa and an elastic modulus of 220–235 GPa.

Place, publisher, year, edition, pages
Elsevier, 2011
National Category
Natural Sciences
Identifiers
urn:nbn:se:liu:diva-65698 (URN)10.1016/j.tsf.2010.11.052 (DOI)000287631500008 ()
Funder
Swedish Research Council
Note
Original Publication: Ali Khatibi, Justinas Palisaitis, Carina Höglund, Anders Eriksson, Per O. Å. Persson, Jens Jensen, Jens Birch, Per Eklund and Lars Hultman, Face-Centered Cubic (Al1-xCrx)2O3 , 2011, Thin Solid Films, (519), 2426-2429. http://dx.doi.org/10.1016/j.tsf.2010.11.052 Copyright: Elsevier Science B.V., Amsterdam. http://www.elsevier.com/ Available from: 2011-02-21 Created: 2011-02-17 Last updated: 2017-12-11Bibliographically approved
2. Kinetics of Phase Transformation in fcc-(Al0.32Cr0.68)2O3 Thin Films
Open this publication in new window or tab >>Kinetics of Phase Transformation in fcc-(Al0.32Cr0.68)2O3 Thin Films
(English)Manuscript (preprint) (Other academic)
Abstract [en]

Thermal stability of fcc-(Al0.32Cr0.68)2O3 thin film is investigated by ex-situ annealing of films in the temperature range of 500-1100 °C and annealing times of 2-10 h. X-ray diffraction indicates that the phase transformation from fcc to corundum crystal structure starts at 925 °C and completes at 1000 °C. This is further confirmed by high resolution transmission electron microscopy and selected area electron diffraction. The kinetics of phase transformation is analyzed by Johnson-Avrami-Mehl model. The phase transformation from fcc to corundum in (Al0.32Cr0.68)2O3 thin films is a two-stage thermally activated process. The first stage is phase transformation and has the apparent activation energy of 213±162 kJ/mol (0.44±0.34 eV/atom). This is followed by a second stage with a larger apparent activation energy of 945±27 kJ/mol (1.96±0.06 eV/atom). This is likely associated with the grain growth of a-phase upon completion of the phase transformation.

National Category
Natural Sciences
Identifiers
urn:nbn:se:liu:diva-65699 (URN)
Available from: 2011-02-17 Created: 2011-02-17 Last updated: 2011-12-05Bibliographically approved

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