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Ceramic microcomponents for high-temperature fluidics
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2010 (English)In: Technical DigestPowerMEMS 2010, The 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Leuven, Belgium, December 1-3, 2010: Poster Sessions, 2010, p. 291-294Conference paper, Published paper (Refereed)
Abstract [en]

For aggressive environments, the material properties of silicon become a limitation. Macroscopically, ceramics are as abundant for high-temperature applications as is silicon in miniaturized systems, but this group of materials has been little exploited for MEMS components. A major reason is the lack of means for high-resolution structuring. This paper describes the application of silicon-based manufacturing processes in the fabrication of ceramic yet truly micromechanical structures and devices for very high-temperature applications, and demonstrates the technique’s implementation in, and significance for, high-temperature microfluidics. Embossing of structures down to 2 µm wide is demonstrated, as well as deep embossing (50 µm), punching through 15 µm tape, and lamination of structured layers. The resulting samples survive temperatures of 1400ºC.

Place, publisher, year, edition, pages
2010. p. 291-294
Keyword [en]
microfluidics, high-temperature, ceramics
National Category
Other Materials Engineering
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-139215ISBN: 978-9-07380-288-9 (print)OAI: oai:DiVA.org:uu-139215DiVA, id: diva2:380803
Conference
PowerMEMS 2010, The 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Leuven, Belgium, December 1-3, 2010
Available from: 2010-12-30 Created: 2010-12-22 Last updated: 2015-01-07Bibliographically approved

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