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Improving the thermoelectric performance of scandium nitride thin films by implanting helium ions
Univ Poitiers, PPRIME Inst, CNRS,UPR 3346, ENSMA,ENSMA,SP2MI,TSA 41123, F-86073 Poitiers 9, France.;Oak Ridge Natl Lab, Mat Sci & Technol Div, Oak Ridge, TN 37831 USA..
Univ Poitiers, PPRIME Inst, CNRS,UPR 3346, ENSMA,ENSMA,SP2MI,TSA 41123, F-86073 Poitiers 9, France.;Univ Paris Saclay, CentraleSupelec SPMS, F-91192 Gif sur Yvette, France..
Univ Poitiers, PPRIME Inst, CNRS,UPR 3346, ENSMA,ENSMA,SP2MI,TSA 41123, F-86073 Poitiers 9, France..
Sorbonne Univ, Inst Nanosci Paris, UFR 925, UMR 7588, F-75005 Paris, France..
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2025 (English)In: Communications Materials, E-ISSN 2662-4443, Vol. 6, article id 30Article in journal (Refereed) Published
Abstract [en]

Ion implantation is a widely used technique to introduce defects in low-dimensional materials and tune their properties. Here, we investigate the thermoelectric properties of scandium nitride thin films implanted with helium ions, revealing a positive impact of defect engineering on thermoelectric performance. Transport properties modeling and electron microscopy provide insights on the defect distribution in the films. The electrical resistivity and Seebeck coefficient increase significantly in absolute values after implantation and partially recover upon annealing as some of the implantation-induced defects heal. The thermal conductivity decreases by 46 % post- implantation due to the formation of extended defects and nanocavities. Consequently, the thermoelectric figure of merit zT doubles for the sample annealed at 673 K. These findings highlight the potential of controlled ion implantation to enhance thermoelectric properties in thin films, paving the way for further optimization through defect engineering.

Place, publisher, year, edition, pages
Springer Nature, 2025. Vol. 6, article id 30
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Condensed Matter Physics
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URN: urn:nbn:se:uu:diva-551514DOI: 10.1038/s43246-025-00741-2ISI: 001421645000001Scopus ID: 2-s2.0-85218355077OAI: oai:DiVA.org:uu-551514DiVA, id: diva2:1942861
Funder
Swedish Research Council, 2021-03826Knut and Alice Wallenberg Foundation, KAW 2020.0196Swedish Energy Agency, 46519-1Swedish Research Council, 2019-00191Available from: 2025-03-06 Created: 2025-03-06 Last updated: 2025-03-10Bibliographically approved

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