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Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-0080-0708
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
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2020 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 45, no 1, p. 109-112Article in journal (Refereed) Published
Abstract [en]

Carbon dioxide (CO2) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of CO2 provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate CO2 gas sensing at 4.2 µm wavelength using an integrated silicon waveguide, featuring a sensitivity to CO2 of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized CO2 sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications.

Place, publisher, year, edition, pages
2020. Vol. 45, no 1, p. 109-112
Keywords [en]
Carbon dioxide, mid-IR, waveguide, gas sensor, integrated optics, silicon photonics, MEMS.
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-265603DOI: 10.1364/OL.45.000109OAI: oai:DiVA.org:kth-265603DiVA, id: diva2:1380142
Funder
Vinnova, 2016-02328Vinnova, 2017-05108Stockholm County Council, 2015091Swedish Foundation for Strategic Research , GMT14-0071Available from: 2019-12-18 Created: 2019-12-18 Last updated: 2019-12-18Bibliographically approved

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Publisher's full texthttp://ol.osa.org/abstract.cfm?URI=ol-45-1-109

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