Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Integrated thin film resistive sensors for in situ temperature measurements in an acoustic trap
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (EMBLA)ORCID iD: 0000-0001-9503-5481
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.ORCID iD: 0000-0002-5452-7831
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.ORCID iD: 0000-0002-7023-4772
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.ORCID iD: 0000-0002-3966-0220
Show others and affiliations
2019 (English)In: Acoustofluidics 2019: This annual meeting will be held in Twente, The Netherlands in 2019. This focused meeting is dedicated to exploring the science, engineering, and use of micro- to nanoscale acoustofluidics., 2019, p. 140-141Conference paper, Poster (with or without abstract) (Other academic)
Abstract [en]

This work presents an acoustic trap with integrated thin film sensors to monitor temperature variations during operation. The acoustic trap is wet-etched in glass with a thermally bonded glass lid and the thin-film sensors are integrated during fabrication. We evaluated the performance of the integrated temperature sensors and measured a temperature sensitivity of ±0.01 °C and confirmed that the read-out of the thin film sensors was not affected neither by the ionic conducitiviy of the solution nor the addition of microparticles into the acoustic trap. From the experiments we observed a temperature increase of the acoustic trap during operation as a result of the dissipative heating of the the piezoelectric element used to actuate the trap. We also showed that when external convective cooling was applied to the system, the temperature increase of the acoustic trap was higher than the temperature incresase of the piezoelectric element itself. This shows the importance of using integrated temperature sensors in acoustic trapping to monitor the environmental conditions.

Place, publisher, year, edition, pages
2019. p. 140-141
Keywords [en]
acoustophoresis, platinum RTD, external TC, integrated temperature sensor, thin film resistive sensor, acoustic trapping
National Category
Medical Laboratory and Measurements Technologies
Identifiers
URN: urn:nbn:se:uu:diva-398685OAI: oai:DiVA.org:uu-398685DiVA, id: diva2:1376409
Conference
Acoustofluidics 2019, 25-28 August 2019, Enschede, Netherlands
Funder
Knut and Alice Wallenberg FoundationAvailable from: 2019-12-09 Created: 2019-12-09 Last updated: 2019-12-09Bibliographically approved

Open Access in DiVA

fulltext(362 kB)14 downloads
File information
File name FULLTEXT01.pdfFile size 362 kBChecksum SHA-512
392ece25168b1f4fff016820cceb688a82e235a41a7d4cdc167f1e6758412d81db8e773c9d14ae51e86626902470eed4a491d864b0c50be679f7ce73939f8cc8
Type fulltextMimetype application/pdf

Search in DiVA

By author/editor
Werr, GabrielKhaji, ZahraOhlin, MathiasAndersson, MartinKlintberg, LenaSearle, SeanHjort, KlasTenje, Maria
By organisation
Microsystems TechnologyApplied Materials SciencesScience for Life Laboratory, SciLifeLabÅngström Space Technology Centre (ÅSTC)Solid State Physics
Medical Laboratory and Measurements Technologies

Search outside of DiVA

GoogleGoogle Scholar
Total: 14 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 38 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf