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Multilayer Micromachined Dual-Mode Elliptic Cavities Filter With Axial Feeding at 270 GHz
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (THz MEMS)ORCID iD: 0000-0002-7033-2452
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (THz MEMS)
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (THz MEMS)ORCID iD: 0000-0002-8514-6863
KTH, School of Electrical Engineering (EES), Micro and Nanosystems. (THz MEMS)ORCID iD: 0000-0001-5662-6748
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2018 (English)Conference paper, Published paper (Refereed)
Abstract [en]

A silicon micromachined multilayer bandpass filters using dual-mode elliptic cavities at 270 GHz is shown.The cross-coupled filter has been designed taking into accountthe side-walls non-verticality. Good agreement with simulations has been obtained for the filter. Excellent performancein terms of losses has been demonstrated.

Place, publisher, year, edition, pages
2018.
Keywords [en]
Elliptic cavity filter, Micromachining, sumillimeter-wave, Dual-mode cavity filter
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-264950OAI: oai:DiVA.org:kth-264950DiVA, id: diva2:1375963
Conference
14th GigaHertz Symposium (Swedish Microwave Days), Lund, Sweden, 24-25 May 2018
Note

QC 20191210

Available from: 2019-12-06 Created: 2019-12-06 Last updated: 2019-12-10Bibliographically approved

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CiteExportLink to record
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