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Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation
KTH, School of Industrial Engineering and Management (ITM), Energy Technology. Department of Bioproducts and Biosystems, Aalto University, Espoo, Finland.ORCID iD: 0000-0003-0923-9010
Interuniversity Microelectronics Center (imec), Leuven, Belgium.
KTH, Superseded Departments (pre-2005), Energy Technology.ORCID iD: 0000-0002-3661-7016
Department of Bioproducts and Biosystems, Aalto University, Espoo, Finland.
2020 (English)In: Separation and Purification Technology, ISSN 1383-5866, E-ISSN 1873-3794, Vol. 235, article id 116201Article in journal (Refereed) Published
Abstract [en]

Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.

Place, publisher, year, edition, pages
Elsevier, 2020. Vol. 235, article id 116201
Keywords [en]
Chemical mechanical planarization, Separation efficiency, Membrane distillation, Nano-electronics, Energy analysis
National Category
Engineering and Technology
Research subject
Energy Technology; Chemical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-264242DOI: 10.1016/j.seppur.2019.116201Scopus ID: 2-s2.0-85073547535OAI: oai:DiVA.org:kth-264242DiVA, id: diva2:1372635
Note

QC 20191202

Available from: 2019-11-25 Created: 2019-11-25 Last updated: 2019-12-02Bibliographically approved

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