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MEMS for Photonic Integrated Circuits
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.
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2020 (English)In: IEEE Journal of Selected Topics in Quantum Electronics, ISSN 1077-260X, E-ISSN 1558-4542, Vol. 26, no 2, p. 1-16Article in journal (Refereed) Published
Abstract [en]

The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

Place, publisher, year, edition, pages
IEEE Press, 2020. Vol. 26, no 2, p. 1-16
Keywords [en]
Tuning, Micromechanical devices, Optical waveguides, Integrated optics, Optical refraction, Optical variables control, Nonlinear optics, Microelectromechanical systems, photonic integrated circuits, silicon photonics, photonics, nanophotonics, integrated optics, nanoelectromechanical systems, MEMS, PIC
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-263070DOI: 10.1109/JSTQE.2019.2943384ISI: 000492893000001OAI: oai:DiVA.org:kth-263070DiVA, id: diva2:1366333
Projects
Morphic
Funder
EU, Horizon 2020, 780283
Note

QC 20191029

Available from: 2019-10-29 Created: 2019-10-29 Last updated: 2019-11-08Bibliographically approved

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Errando-Herranz, CarlosEdinger, PierreGylfason, Kristinn B.
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