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Optimizing the stoichiometry of ultrathin NbTiN films for high-performance superconducting nanowire single-photon detectors
Royal Inst Technol KTH, Dept Appl Phys, SE-10691 Stockholm, Sweden.
Delft Univ Technol, Fac Appl Sci, ImPhys Dept, Opt Res Grp, Lorentzweg 1, NL-2628 CJ Delft, Netherlands.
Royal Inst Technol KTH, Dept Appl Phys, SE-10691 Stockholm, Sweden.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.ORCID iD: 0000-0001-7266-0022
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2019 (English)In: Optics Express, E-ISSN 1094-4087, Vol. 27, no 19, p. 26579-26587Article in journal (Refereed) Published
Abstract [en]

The requirements in quantum optics experiments for high single-photon detection efficiency. low timing jitter, low dark count rate and short dead time have been fulfilled with the development of superconducting nanowire single-photon detectors. Although they offer a detection efficiency above 90%, achieving a high time resolution in devices made of amorphous materials is a challenge, particularly at temperatures above 0.8 K. Devices made from niobium nitride and niobium titanium nitride allow us to reach the best timing jitter but. in turn, have stronger requirements in terms of film quality to achieve a high efficiency. Here we take advantage of the flexibility of reactive co-sputter deposition to tailor the composition of NbxTi1-xN superconducting films and show that a Nb fraction of x = 0.62 allows for the fabrication of detectors from films as thick as 9 nm and covering an active area of 20 mu m. with a wide detection saturation plateau at telecom wavelengths and in particular at 1550 nm. This is a signature of an internal detection efficiency saturation, achieved while maintaining the high time resolution associated with NbTiN and operation at 2.5K. With our optimized recipe, we reliably fabricated detectors with high critical current densities reaching a saturation plateau at 1550 nm with 80% system detection efficiency and with a FWHM timing jitter as low as 19.5 ps. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Place, publisher, year, edition, pages
OPTICAL SOC AMER , 2019. Vol. 27, no 19, p. 26579-26587
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Atom and Molecular Physics and Optics Condensed Matter Physics
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URN: urn:nbn:se:uu:diva-395310DOI: 10.1364/OE.27.026579ISI: 000486373100026OAI: oai:DiVA.org:uu-395310DiVA, id: diva2:1362279
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Swedish Research Council, 2013-7152Knut and Alice Wallenberg FoundationAvailable from: 2019-10-18 Created: 2019-10-18 Last updated: 2022-09-15Bibliographically approved

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