Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering
Linnaeus Univ, Sweden.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-6371-0638
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Show others and affiliations
2019 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 372, p. 9-15Article in journal (Refereed) Published
Abstract [en]

In this work, amorphous thin films in Mg-Si-O-N system typically containing amp;gt; 15 at.% Mg and 35 at.% N were prepared in order to investigate especially the dependence of optical and mechanical properties on Mg composition. Reactive RF magnetron co-sputtering from magnesium and silicon targets were used for the deposition of Mg-Si-O-N thin films. Films were deposited on float glass, silica wafers and sapphire substrates in an Ar, N-2 and O-2 gas mixture. X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, spectroscopic ellipsometry, and nanoindentation were employed to characterize the composition, surface morphology, and properties of the films. The films consist of N and Mg contents up to 40 at.% and 28 at.%, respectively and have good adhesion to substrates and are chemically inert. The thickness and roughness of the films increased with increasing content of Mg. Both hardness (16-21 GPa) and reduced elastic modulus (120-176 GPa) are strongly correlated with the amount of Mg content. The refractive index up to 2.01 and extinction coefficient up to 0.18 were found to increase with Mg content. The optical band gap (3.1-4.3) decreases with increasing the Mg content. Thin film deposited at substrate temperature of 100 degrees C shows a lower value of hardness (10 GPa), refractive index (1.75), and higher values of reduced elastic modulus (124 GPa) as compared to the thin film deposited at 310 degrees C and 510 degrees C respectively, under identical synthesis parameters.

Place, publisher, year, edition, pages
Elsevier, 2019. Vol. 372, p. 9-15
Keywords [en]
Mg-Si-O-N thin films; Sputtering; High magnesium content; Hardness; Modulus; Refractive index; Band gap
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-159122DOI: 10.1016/j.surfcoat.2019.05.015ISI: 000474676200002OAI: oai:DiVA.org:liu-159122DiVA, id: diva2:1339681
Note

Funding Agencies|VINNOVA [2015-04809]; AForsk Foundation [14-457]; European Research Council under the European Community/ERC [335383]; Swedish Foundation for Strategic Research (SSF); Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [2009 00971]

Available from: 2019-07-30 Created: 2019-07-30 Last updated: 2019-08-20

Open Access in DiVA

fulltext(1729 kB)38 downloads
File information
File name FULLTEXT03.pdfFile size 1729 kBChecksum SHA-512
72326180020bfaf21dc813d0a30f2a0252f25ed0ea229e52ed51d503441a082d984330dd5297a9ae16eb3dc4e54087a6920ca09466be3584d9af425388328e22
Type fulltextMimetype application/pdf

Other links

Publisher's full textLink to accepted manuscript at arXiv

Search in DiVA

By author/editor
Paul, BiplabMagnusson, RogerEkström, ErikPallier, CamilleEklund, PerBirch, Jens
By organisation
Thin Film PhysicsFaculty of Science & Engineering
In the same journal
Surface & Coatings Technology
Inorganic Chemistry

Search outside of DiVA

GoogleGoogle Scholar
Total: 41 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 129 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf