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Carbon Dioxide Sensing with Low-confinementHigh-sensitivity Mid-IR SiliconWaveguides
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0080-0708
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
Senseair AB.
Senseair AB.
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2019 (English)In: Conference on Lasers and Electro-Optics 2019: CLEO: Science and Innovations, 2019, article id STh1F.3Conference paper, Oral presentation with published abstract (Refereed)
Abstract [en]

We present a low-confinement Si waveguide for 4.26 μm wavelength and applyit to sense CO2 concentrations down to 0.1 %. We demonstrate the highest reportedwaveguide sensitivity to CO2: 44% of the free-space sensitivity.

Place, publisher, year, edition, pages
2019. article id STh1F.3
Keywords [en]
Photonics, Optical sensing, Spectroscopy, Carbon dioxide, CO2, Waveguide, Infrared, Mid-infrared, Microsystems, Microtechnology
National Category
Nano Technology Remote Sensing Other Physics Topics
Research subject
Physics; Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-253841DOI: 10.1364/CLEO_SI.2019.STh1F.3OAI: oai:DiVA.org:kth-253841DiVA, id: diva2:1327380
Conference
Conference on Lasers and Electro-Optics (CLEO) 2019
Funder
Vinnova, 2016-02328Vinnova, 2017-05108Stockholm County Council, 20150910Swedish Foundation for Strategic Research , GMT14-0071
Note

QC 20190802

Available from: 2019-06-19 Created: 2019-06-19 Last updated: 2019-08-02Bibliographically approved

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Ottonello-Briano, FloriaErrando-Herranz, CarlosSohlström, HansGylfason, Kristinn B.
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