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An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8514-6863
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8894-7930
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-6748-6477
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2018 (English)Conference paper, Published paper (Refereed)
Abstract [en]

A very low-loss micromachined waveguide bandpassfilter for use in D-band (110–170GHz) telecommunication applicationsis presented. The 134–146GHz filter is implemented in a silicon micromachined technology which utilises a double H-plane split, resulting in significantly lower insertion loss than conventional micromachined waveguide devices. Custom split-blocks are designed and implemented to interface with the micromachined component. Compact micromachined E-plane bends connect the split-blocks and DUT. The measured insertion loss per unit length of the waveguide technology (0.008–0.016 dB/mm) is the lowest reported to date for any micromachined waveguide at D-band. The fabricated 6-pole filter, with a bandwidth of 11.8 GHz (8.4%), has a minimum insertion loss of 0.41 dB, averaging 0.5 dB across its 1 dB bandwidth, making it the lowest-loss D-band filter reported to date in any technology. Its return loss is better than 20 dB across 85% of the same bandwidth. The unloaded quality factor of a single cavity resonator implemented in this technology is estimated to be 1600.

Place, publisher, year, edition, pages
2018.
Keywords [en]
D-band, bandpass filter, micromachined waveguide, waveguide filter, wireless link, telecommunication
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-231074OAI: oai:DiVA.org:kth-231074DiVA, id: diva2:1221988
Conference
2018 IEEE MTT-S International Microwave Symposium (IMS)
Funder
Swedish Foundation for Strategic Research , SE13- 007EU, Horizon 2020, 644039EU, Horizon 2020, 616846
Note

QC 20180625

Available from: 2018-06-20 Created: 2018-06-20 Last updated: 2018-06-25Bibliographically approved

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