Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Micromachined Waveguides with Integrated Silicon Absorbers and Attenuators at 220–325 GHz
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-5662-6748
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8264-3231
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0003-3339-9137
2018 (English)In: IEEE MTT-S International Microwave Symposium, IEEE conference proceedings, 2018 / [ed] IEEE, IEEE, 2018Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports for the first time on micromachined waveguides with integrated micromachined silicon absorbers. In contrast to epoxy-based microwave absorbers, micromachined lossy silicon absorbers are fully compatible with high temperature fabrication and assembly processes for micromachined waveguides. Furthermore, micromachining enables the fabrication of exact, near ideal taper tips for the silicon absorbers, whereas the tip of epoxy-based absorbers cannot be shaped accurately and reproducibly for small waveguides. Silicon of different conductivity is a very well understood and characterized dielectric material, in contrast to conventional absorber materials which are not specified above 60 GHz. Micromachined silicon waveguides with integrated absorbers and attenuators were designed, fabricated and characterized in the frequency band of 220 – 325 GHz. The return and insertion loss for various taper-geometry variations of double-tip tapered absorbers and attenuators was studied. The average return loss for the best investigated device is 19 dB over the whole band. The insertion loss of the two-port attenuators is 16 – 33 dB for different designs and shows an excellent agreement to the simulated results. The best measured devices of the one-port absorbers exhibit an average and worst-case return loss of 22 dB and 14 dB, respectively, over the whole band. The return loss is not characterized by a good simulation-measurement match, which is most likely attributed to placement tolerances of the absorbers in the waveguide cavities affecting the return but not the insertion loss.

Place, publisher, year, edition, pages
IEEE, 2018.
Keywords [en]
RF MEMS, micromachined waveguide, rectangular waveguide, submillimeter-wave, terahertz, absorbers, attenuators, matched load
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-231072OAI: oai:DiVA.org:kth-231072DiVA, id: diva2:1221974
Conference
IEEE MTT-S International Microwave Symposium, Philadelphia, USA, 10-15 June 2018
Projects
SSF Swedish Foundation for Strategic Research, Synergy Grant Electronics SEl3-007
Funder
Swedish Foundation for Strategic Research , SEl3-007EU, European Research Council, 616846
Note

QC 20180625

Available from: 2018-06-20 Created: 2018-06-20 Last updated: 2018-06-25Bibliographically approved

Open Access in DiVA

fulltext(2972 kB)24 downloads
File information
File name FULLTEXT01.pdfFile size 2972 kBChecksum SHA-512
0cd63d72f3069d547438b1d350fbb00197a460c7d275931c9946e0d3a4432dafbce7a3ea36dd592e9e1359682402b42a2bd4aa72327d88cc0a478391463a3229
Type fulltextMimetype application/pdf

Other links

Conference webpage

Search in DiVA

By author/editor
Beuerle, BernhardShah, UmerOberhammer, Joachim
By organisation
Micro and Nanosystems
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 24 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 251 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf