Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Plasma CVD of hydrogenated boron-carbon thin films from triethylboron
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. European Spallat Source ERIC, Sweden.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. European Spallat Source ERIC, Sweden.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. European Spallat Source ERIC, Sweden; IHI Ionbond AG, Switzerland.
European Spallat Source ERIC, Sweden; Mid Sweden Univ, Sweden.
Show others and affiliations
2018 (English)In: Journal of Chemical Physics, ISSN 0021-9606, E-ISSN 1089-7690, Vol. 148, no 3, article id 034701Article in journal (Refereed) Published
Abstract [en]

Low-temperature chemical vapor deposition (CVD) of B-C thin films is of importance for neutron voltaics and semiconductor technology. The highly reactive trialkylboranes, with alkyl groups of 1-4 carbon atoms, are a class of precursors that have been less explored for low-temperature CVD of B-C films. Herein, we demonstrate plasma CVD of B-C thin films using triethylboron (TEB) as a single source precursor in an Ar plasma. We show that the film density and B/C ratio increases with increasing plasma power, reaching a density of 2.20 g/cm(3) and B/C = 1.7. This is attributed to a more intense energetic bombardment during deposition and more complete dissociation of the TEB molecule in the plasma at higher plasma power. The hydrogen content in the films ranges between 14 and 20 at. %. Optical emission spectroscopy of the plasma shows that BH, CH, C-2, and H are the optically active plasma species from TEB. We suggest a plasma chemical model based on beta-hydrogen elimination of C2H4 to form BH3, in which BH3 and C2H4 are then dehydrogenated to form BH and C2H2. Furthermore, C2H2 decomposes in the plasma to produce C-2 and CH, which together with BH and possibly BH3-x(C2H5)(x) are the film forming species. (c) 2018 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution ( CC BY) license (http://creativecommons.org/licenses/by/4.0/).

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2018. Vol. 148, no 3, article id 034701
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-145136DOI: 10.1063/1.5006886ISI: 000423029200017PubMedID: 29352776Scopus ID: 2-s2.0-85040715537OAI: oai:DiVA.org:liu-145136DiVA, id: diva2:1182450
Note

Funding Agencies|European Spallation Source ERIC; Knut and Alice Wallenberg Foundation; EU BrightnESS project [676548]

Available from: 2018-02-13 Created: 2018-02-13 Last updated: 2018-03-08Bibliographically approved

Open Access in DiVA

fulltext(1770 kB)11 downloads
File information
File name FULLTEXT01.pdfFile size 1770 kBChecksum SHA-512
7747f476d7ff28729c4886ac8f75664ae46dd5850b127ea945d02ee413054babd3ef43fbdf673d48dfb56b7e1824c39c1fd945c92db581e8695754cc68a21845
Type fulltextMimetype application/pdf

Other links

Publisher's full textPubMedScopus

Search in DiVA

By author/editor
Imam, MewludeHöglund, CarinaSchmidt, SusannBirch, JensPedersen, Henrik
By organisation
Thin Film PhysicsFaculty of Science & EngineeringChemistry
In the same journal
Journal of Chemical Physics
Inorganic Chemistry

Search outside of DiVA

GoogleGoogle Scholar
Total: 11 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
pubmed
urn-nbn

Altmetric score

doi
pubmed
urn-nbn
Total: 139 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf